MEMS (Micro-electromechanical Systems) wideband frequency vibration energy collector based on PMNT (Lead Magnesium Niobate-Lead Titanate) piezoelectric mono-crystal, and preparation method

Abstract

The invention provides an MEMS (Micro-electromechanical Systems) wideband frequency vibration energy collector based on PMNT (Lead Magnesium Niobate-Lead Titanate) piezoelectric mono-crystal. The device is a piezoelectric device which converts mechanical energy of flexural vibration into electric energy and comprises a silicon fixing seat, a support layer, a PMNT piezoelectric film layer and a mass block, wherein the silicon fixing seat, the support layer and the PMNT piezoelectric film layer are adhered sequentially to form a multilayer structure; one end of the multilayer structure is suspended; and the mass block is fixed on a free end of the multiplayer structure. According to the invention, PMNT mono-crystal which has better piezoelectric performance is adopted as piezoelectric material, and PMNT piezoelectric films having high performance are manufactured with a bonding and thinning method, such that the output property of the device can be improved effectively, and the conversion efficiency is increased; at the same time, a micro-container which is fixed at the end part of a cantilever and is full of liquid is adopted, such that inherent frequency of the device under a vibration condition can be changed effectively in real time, and the vibration frequency of the environment is matched better, and the device can obtain stable output in the vibration environment within a relatively wide frequency scope.

Description

technical field [0001] The invention relates to a device in the field of energy technology, in particular to a MEMS broadband energy harvester based on a PMNT piezoelectric single crystal and a preparation method thereof. Background technique [0002] With the continuous deepening of research on wireless sensor networks and various implanted sensors, new requirements and challenges are put forward for its power supply. Miniature piezoelectric vibration energy harvester, as a new type of self-sustaining micro-energy that does not need to be replaced and unattended, can convert the vibration of the device's environment into electrical energy through the piezoelectric effect and can be used for various low-power microelectronics. Device power supply is receiving more and more attention from academia and industry. [0003] At present, most of the piezoelectric energy harvesters prepared by MEMS technology are multi-layer cantilever beam structures formed by depositing a layer o...

AI Technical Summary

Problems solved by technology

[0007] The present invention aims at the above-mentioned deficiencies that exist in the prior art, proposes a kind of MEMS broadband vibration energy harvester and preparation method based on PMNT piezoelectric single crystal, makes piezoelectric transducer element obtain greater output power under low-frequency vibration environment, with Solve the problems of low output power and narrow operating frequency band of traditional MEMS piezoelectric energy harvesters

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