Sol-gel preparation method of strontium titanate lead thin film

A strontium lead titanate and sol-gel technology, which is applied in the field of preparation of functional dielectric films, can solve the problems of long storage time and poor dielectric tuning performance, and achieve the effects of high preparation efficiency, inhibition of hydrolysis, and low temperature

Inactive Publication Date: 2012-06-27
CHINA THREE GORGES UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

It can be seen that, on the one hand, the dielectric tuning performance of the PST films currently prepared is far worse than that of ceramics, and on the other hand, the preparation process of PST films also needs to be improved in terms of environmental protection.
In addition, in the actual preparation process of PST sol-gel, how to prepare a sol with no impurity phase at low temperature, a long storage time, a good uniformity of gel rejection, and a film with good dielectric tuning performance still need to be further solved. aspect

Method used

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  • Sol-gel preparation method of strontium titanate lead thin film
  • Sol-gel preparation method of strontium titanate lead thin film
  • Sol-gel preparation method of strontium titanate lead thin film

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Experimental program
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Effect test

Embodiment 1

[0019] Embodiment 1: No miscellaneous strontium titanate lead Pb 0.3 Sr 0.7 TiO 3 Sol preparation

[0020] 7.51g of strontium acetate [Sr(CH 3 COO) 2 ] and 5.97g of lead acetate trihydrate [ Pb(CH 3 COO) 2 ·3H 2 O] dissolve the mixed solution of deionized water and glacial acetic acid to obtain solution A; then dissolve the tetrabutyl titanate of 17.5g in ethylene glycol methyl ether, stir and mix evenly to obtain solution B; pour solution B into In solution A, add acetylacetone, formamide and glycerol in a volume ratio of 2~4:1.4~2.2:1.5~2.1 in sequence, stir evenly, heat to 90°C for 1 hour, and filter to obtain a clear and transparent precursor body sol. like figure 1 The strontium lead titanate sol stored for 3 months is still clear and transparent.

[0021] Pour a small amount of strontium lead titanate Pb 0.3 Sr 0.7 TiO 3 The sol was put into a dry pot and calcined at 750°C for 1 hour to obtain a white powder. Use XRD to do the phase test of the powder, suc...

Embodiment 2

[0022] Embodiment 2: lead strontium titanate Pb 0.3 Sr 0.7 TiO 3 thin film preparation and its dielectric tuning properties

[0023] The prepared Pb 0.3 Sr 0.7 TiO 3 After the precursor sol was aged for 1~2 weeks, the Pt / Ti / SiO 2 / Si substrate was prepared by spin-coating at a speed of 4000 rpm for 25 seconds; then the coated film was annealed at 700°C for 0.5h; the process of "spin coating-annealing" was repeated several times to obtain the desired thickness of strontium lead titanate film.

[0024] Using magnetron sputtering equipment on Pt / Ti / SiO 2 / Pb on Si substrate 0.3 Sr 0.7 TiO 3 The Au top electrode was prepared on the film to form a plate capacitor, and the dielectric tuning performance was tested with Aginengt 4294A. like image 3 As shown, the film has excellent dielectric tuning performance: the tuning amount is 66.4%, and the dielectric loss is 0.029.

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Abstract

A sol-gel preparation method of a strontium titanate lead thin film is high in tunability and uses tetrabutyl titanate, lead acetate trihydrate and strontium atetate as raw materials and ethylene glycol monomethyl ether and acetic acid as solvents to prepare a strontium titanate lead sol precursor. A thin film is prepared on a substrate in spinning coating method, annealing treatment is carried out repeatedly to obtain a strontium titanate lead ferroelectric thin film. The prepared strontium titanate lead thin film is compact, uniform in granularity and better in quality, has no unclear second phase and has high tunability, the whole process is simple, the period is relatively short, time and cost are saved, and the sol-gel preparation method can manufacture the strontium titanate lead thin film with high performance and has good market application prospect.

Description

technical field [0001] The invention relates to a preparation method of a functional dielectric film, which belongs to the field of ferroelectric film materials and the field of preparation of electronic components, in particular to a method for preparing a strontium lead titanate film by a sol-gel method. Background technique [0002] Lead strontium titanate (PST) ferroelectric material has the characteristics of high dielectric constant, low dielectric loss, large tuning rate, fast response speed, and its Curie temperature can be adjusted with Pb / Sr, so it is considered It is an ideal material for microwave tunable devices and dynamic random memory devices. Cross (see Yoshitaka Somiya, Amar S. Bhalla, L, Erie Cross, International Journal of Inorganic Materials 3 (2001) 709-714) of the University of Pennsylvania Cross (see Yoshitaka Somiya, Amar S. Bhalla, L, Erie Cross, International Journal of Inorganic Materials 3 (2001) 709-714) and others have carried out research on s...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B32B9/00C04B35/47C04B35/622
Inventor 孙小华李修能周生刚侯爽罗志猛
Owner CHINA THREE GORGES UNIV
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