Method for preparing Ni-Zn ferrite film

Abstract

The invention discloses a method for preparing a ferrite film, in particular to a method which can obtain a spinel type Ni-Zn ferrite film with better soft magnetic and microwave properties. The method includes the following steps: first depositing a layer of antiferromagnetic material Fe50Mn50 on a substrate, and then depositing a Ni-Zn ferrite film layer on the Fe50Mn50 layer. The method can also prepare multiple layers of Ni-Zn ferrite films. The adoption of the method can enhance the soft magnetic and microwave properties of the prepared Ni-Zn ferrite film.

Description

technical field [0001] The invention relates to a method for preparing a Ni-Zn ferrite film, in particular to a method for obtaining a spinel type Ni-Zn ferrite film with better soft magnetic and microwave properties. Background technique [0002] In recent years, with the rapid development of communications, computers and high-density magnetic recording materials, the performance requirements for magnetic materials are getting higher and higher. Especially with the continuous improvement of information processing frequency (for example: mobile phones, wireless LAN systems and Bluetooth devices and other commonly used operating frequencies have increased to 1-5GHz), involving information storage and conversion (for example: inductors, transformers and electromagnetic shielding systems, etc. ) micromagnetic devices urgently require high-performance magnetic materials operating in the GHz range. Spinel-type Ni-Zn ferrite materials are widely used in transformers, high-frequen...

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Problems solved by technology

Example: using ZnFe 2 o 4 As a substrate layer to improve the soft magnetic properties of Ni-Zn ferrite thin films: J.H.Gao, Y.T.Cui, and Z.Yang, "The magnetic properties of Ni x Zn 1-x Fe 2 o 4 films fabricated by alternative sputtering technology", Materials Science and Engineering B 110, 111-114 (2004); using YSZ (Y 0.15 Zr 0.85 o 2 ) as a substrate layer to prepare and improve the soft magnetic properties of Ni-Zn ferrite thin films: S.Y.Bae, C.S.Kim, and Y.J.Oh, "Magnetic properties of sol-gel derived Ni-Zn ferrite thin films on yttria stabilized zirconia buffered Si( 100)", Journal of Applied Physics 85, 5226-5228 (1999). This traditional method of using non-magnetic oxide as the substrate layer is to improve the softness of the ferrite film by weakening the stress between the substrate and the ferrite film. However, this traditional method only achieves the optimization of the soft magnetic properties of ferrite films (for example: saturation magnetization M s has been improved, the coercive force H c has been reduced), but there is no obvious effect on the improvement of the microwave magnetic properties of ferrite thin films

At the same time, in the existing reported literature, there is no method to effectively improve the soft magnetic properties and microwave magnetic properties of ferrite thin films at the same time.

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