Warping plate type intelligent detection microwave power sensor

Abstract

The invention discloses a warping plate type intelligent detection microwave power sensor. The sensor comprises a substrate, a first coplanar waveguide ground wire, a coplanar waveguide signal wire, a second coplanar waveguide ground wire, a sensing electrode, a driving electrode, an SOC circuit and a warping plate type double-end cantilever beam, wherein the substrate, the first coplanar waveguide ground wire, the coplanar waveguide signal wire, the second coplanar waveguide ground wire, the sensing electrode, the driving electrode and the SOC circuit are sequentially arranged on the substrate, and the warping plate type double-end cantilever beam is arranged on the coplanar waveguide ground wire and is perpendicular to coplanar waveguide. The lower side of the middle of the warping plate type double-end cantilever beam is connected with the second coplanar waveguide ground wire, one end of the warping plate type double-end cantilever beam is arranged above the coplanar waveguide signal wire in a suspension mode, the other end of the warping plate type double-end cantilever beam is arranged above the sensing electrode and the driving electrode, and the SOC circuit is respectively connected with the second coplanar waveguide ground wire, the sensing electrode and the driving electrode through wires. The warping plate type intelligent detection microwave power sensor reduces influence of a small power sensing structure on a device reflective coefficient to the largest extent, ensures good transmission performance of a microwave signal, and meanwhile can improve flexibility and intellectualization.

Description

[0001] technical field [0002] The invention belongs to the technical field of microelectronic devices and relates to a structure for measuring microwave power transmitted on a coplanar waveguide. [0003] Background technique [0004] In microwave technology research, microwave power is an important parameter to characterize microwave signal characteristics. In microwave wireless application and measurement technology, the detection of microwave power is a very important part. The traditional technology for measuring microwave power is based on thermistors, thermocouples or diodes, and these are terminal devices, and the microwave signal will be completely consumed in the power measurement. In recent years, three types of online microwave power sensor structures based on MEMS technology have been proposed abroad: one is to use the ohmic loss on the coplanar waveguide signal line, and convert it into thermoelectric potential output by placing a nearby thermal pile; One i...

AI Technical Summary

Problems solved by technology

The traditional technology for measuring microwave power is based on thermistors, thermocouples or diodes, and these are terminal devices, and the microwave signal will be completely consumed in the power measurement

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