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Method for analyzing adsorbing column of polycrystalline silicon tail gas dry method separation system

A separation system and analysis method technology, applied in the field of adsorption column analysis of polysilicon tail gas dry separation system, can solve the problems of hydrogen shortage, hydrogen waste, and potential safety hazards in leaching and venting, and achieve the effect of saving hydrogen and reducing production costs

Inactive Publication Date: 2014-07-16
SICHUAN RENESOLA SILICON MATERIAL
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AI Technical Summary

Problems solved by technology

After backflushing, the hydrogen entrains a large amount of chlorosilanes. After the chlorosilanes are cooled and separated by circulating water and refrigerant in turn, the hydrogen is sent to the raffinate treatment workshop to be rinsed with circulating water, and then directly vented. On the one hand, this treatment makes the hydrogen not effectively utilized. , resulting in a large amount of waste of hydrogen, which increases production costs; on the other hand, there is a serious shortage of hydrogen in polysilicon production. At the same time, hydrogen is flammable and explosive, and leaching and venting pose a safety hazard

Method used

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  • Method for analyzing adsorbing column of polycrystalline silicon tail gas dry method separation system

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Experimental program
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Effect test

Embodiment 1

[0026] Such as figure 1 As shown, a polysilicon tail gas dry separation system adsorption column analysis method includes the following steps:

[0027] a) First use nitrogen gas to backflush the adsorption column, close vent valve 7 and valve 4, open valve 1, valve 2, valve 3, valve 5, regulating valve PV3503, valve 6, regulating valve PV3505, and the inlet pressure is 1.12 The nitrogen gas of MPa is used to backflush the adsorption column for 6000 seconds, and the flow rate of nitrogen gas is 100Nm 3 / h.

[0028] b) Replace the adsorption column with hydrogen, close valve 1, open valve 7, open valve 4, valve 5, regulating valve PV3503, valve 6, regulating valve PV3505, and introduce hydrogen with a pressure of 1.12MPa to replace the adsorption column 1200 seconds.

[0029] c) After backflushing, the nitrogen or hydrogen with a large amount of chlorosilane is cooled by circulating water and refrigerant. After the chlorosilane is separated, the nitrogen or hydrogen is sent t...

Embodiment 2

[0032] Such as figure 1 As shown, a polysilicon tail gas dry separation system adsorption column analysis method includes the following steps:

[0033] a) Use nitrogen gas to backflush the adsorption column first, close vent valve 7 and valve 4, open valve 1, valve 2, valve 3, valve 5, regulating valve PV3503, valve 6, regulating valve PV3505, and the inlet pressure is 1.15 The nitrogen gas of MPa is used to backflush the adsorption column for 6000 seconds, and the flow rate of nitrogen gas is 100Nm 3 / h.

[0034] b) Replace the adsorption column with hydrogen, close valve 1, open valve 7, open valve 4, valve 5, regulating valve PV3503, valve 6, regulating valve PV3505, and introduce hydrogen with a pressure of 1.15MPa to replace the adsorption column 1200 seconds.

[0035] c) After backflushing, the nitrogen or hydrogen with a large amount of chlorosilane is cooled by circulating water and refrigerant. After the chlorosilane is separated, the nitrogen or hydrogen is sent t...

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Abstract

The invention discloses an adsorption column analysis method for polysilicon tail gas dry separation system, which comprises the following steps: a) using nitrogen gas to backflush the adsorption column for analysis; b) replacing the adsorption column with hydrogen; Nitrogen or hydrogen with a large amount of chlorosilane is cooled by circulating water and refrigerant, and after the chlorosilane is separated, the nitrogen or hydrogen is sent to the raffinate treatment workshop for rinsing and emptying; In the case of serious shortage of hydrogen and the potential safety hazards caused by leaching and venting, use relatively low-cost nitrogen instead of hydrogen to backflush the adsorption column for analysis, and then replace the adsorption column with hydrogen. This treatment can effectively save hydrogen. Reduce production costs and potential safety hazards caused by leaching and venting.

Description

technical field [0001] The invention relates to an adsorption column analysis method for a polysilicon tail gas dry separation system. Background technique [0002] In the traditional crystalline silicon production process, the tail gas produced mainly includes hydrogen, hydrogen chloride, dichlorodihydrosilane, trichlorosilane, and silicon tetrachloride. These tail gases mainly rely on the tail gas separation device to recover hydrogen, hydrogen chloride and chlorine respectively. Silane liquid, in which activated carbon adsorption technology is used for hydrogen recovery, and the purity of recovered hydrogen is about 97%. However, due to the entrainment of a small amount of hydrogen chloride and chlorosilane liquid in hydrogen, the adsorption column will reach saturation after a long time of adsorption, and hydrogen must be used to react the adsorption column. Blow analysis to regenerate activated carbon. After backflushing, the hydrogen entrains a large amount of chloros...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B01D53/04
Inventor 沈伟孙明炳
Owner SICHUAN RENESOLA SILICON MATERIAL
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