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mems analog detector movement

A technology for simulating a geophone and a movement, applied in the field of geological exploration, can solve the problems such as the inability to guarantee the consistency of the sensor waveform, the difficulty in ensuring the consistency of the product performance with the process accuracy, etc. stable effect

Active Publication Date: 2011-12-14
XIAN SITAN INSTR
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Problems solved by technology

[0011] In order to solve the above-mentioned technical problems in the background technology, the present invention provides a MEMS analog detector core, which solves the problem that the damping source is separated from the inertial body, and the quality and damping of the inertial body cannot be made to have good consistency at the same time. Therefore, the consistency of the waveform collected by the sensor cannot be guaranteed, and the technical problems that the product process accuracy and product performance consistency are not easy to ensure

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[0026]An ideal detector not only has a good acquisition ability for high-frequency weak signals in deep and thin layers, but also can take into account low-frequency signals, and has sufficient bandwidth, generally 3 to 1500 Hz. The present invention is designed according to this: the mass of the inertial body and the consistency of damping are good, which can ensure the consistency of the waveform collected by the sensor, that is, the phase axis; the mass of the inertial body is large, and the amplitude of the collected waveform is large; the damping is large enough, so the The aftershock or "tail" of the acquired waveform is small.

[0027] The simplified basic structure of the present invention includes an inertial body 16, an elastic vibrating body 5, circuit parts, etc., and the inertial body 16 is the core of the whole device. The basic principle of detecting the seismic acceleration signal is: use the inertial body as the media medium, take the medium displacement chang...

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Abstract

The invention relates to a machine core of an MEMS (Micro Electro Mechanical System) simulation acceleration detector. The machine core of the MEMS simulation detector comprises a signal converter, an impedance converter and a micro mechanical vibration system. The signal converter is connected into the micro mechanical vibration system through the impedance converter. According to the machine core of the MEMS simulation detector provided by the invention, because the weight and the damping of an inertial body cannot have better consistencies simultaneously when a damping source and the inertial body are separated, the technical problems of the consistency of waveforms acquired by a sensor and difficult assurance of consistencies of product process precision and product performance are solved.

Description

technical field [0001] The invention belongs to the field of geological exploration, and relates to a geophone for seismic exploration, in particular to a core of a MEMS analog acceleration geophone. Background technique [0002] Geological exploration seismic wave signals contain high and low frequency components, among which low frequency components are abundant. During the propagation of the signal in the formation, the energy loss of the high-frequency component is faster, and the farther the propagation is, the greater the loss ratio is. The weaker the high-frequency signal is, the more unfavorable it is to the resolution of the formation exploration. At present, geological and geophysical prospecting technology has been developed to high-resolution exploration. The bottleneck of high-resolution exploration is mainly the acquisition of high-frequency and weak signals in deep and thin layers. The source of acquisition is the geophone. The geophones used in the geophysi...

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Application Information

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IPC IPC(8): G01V1/18B81B7/02
Inventor 强明明蔡潇
Owner XIAN SITAN INSTR
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