Iron-containing fixed abrasive grinding and polishing pad

A technology of consolidating abrasives and polishing pads, which is applied in abrasives, metal processing equipment, manufacturing tools, etc., can solve the problems of affecting the processing surface shape accuracy, insufficient rigidity of grinding and polishing pads, and reducing processing efficiency, so as to improve surface shape accuracy, Avoid downtime for dressing polishing pads and improve processing efficiency

Inactive Publication Date: 2011-12-07
NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The object of the present invention is to solve the problem that the rigidity of the grinding and polishing pad is not enough in the existing processing process and needs to be constantly trimmed, which affects the surface shape accuracy of the processing and reduces the processing efficiency. knot abrasive polishing pad

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0019] Example 1: An iron-containing consolidated abrasive grinding and polishing pad, which is formed by uniformly mixing and curing abrasives, iron powder and resin, and its preparation method is the same as that of the existing polishing pad, wherein 400g of silicon carbide abrasive, 150g of atomized iron powder, and 450g of resin (Can adopt the exact same resin that uses with existing polishing pad, as hydrophilic resin, also can adopt the applicant's application number that is 2007100248219, 2008102440960, 2008100227414, 2009102135958, 201010145260X the resin formula used in to realize, the same below). The key point of the present invention is that iron powder is added to the polishing pad, and the remaining components are basically the same as the prior art except for the ratio relationship. The silicon carbide has a particle size of 50 microns and the atomized iron powder has a particle size of 20 microns. Made into grinding and polishing pads, the surface shape of K...

Embodiment 2

[0020] Example 2: An iron-containing fixed abrasive grinding and polishing pad is formed by uniformly mixing and curing abrasives, iron powder and resin. Its preparation method is the same as that of the existing polishing pad, wherein 200g of cerium oxide abrasive, 250g of electrolytic iron powder, and 550g of resin. The key point of the present invention is that iron powder is added to the polishing pad, and the remaining components are basically the same as the prior art except for the ratio relationship. The particle size of the cerium oxide is 10 microns, and the particle size of the electrolytic iron powder is 10 microns. The surface shape of K9 glass made of grinding and polishing pad is increased by 180%, the material removal rate is increased by 230%, and the self-repairing ability is increased by 55 times. Grinding and polishing monocrystalline silicon wafers, the surface shape is improved by 50%, the material removal rate is increased by 150%, and the self-repairi...

Embodiment 3

[0021] Example 3: An iron-containing fixed abrasive grinding and polishing pad, which is formed by uniformly mixing and curing abrasives, iron powder and resin, and its preparation method is the same as that of the existing polishing pads. The specific composition is 350g of diamond abrasive, 150g of hydroxyl iron powder, and 500g of resin . The key point of the present invention is that iron powder is added to the polishing pad, and the remaining components are basically the same as the prior art except for the ratio relationship. The particle size of the diamond is 40 microns, and the particle size of the hydroxyl iron powder is 20 microns. The surface shape of K9 glass made of grinding and polishing pad is increased by 140%, the material removal rate is increased by 28%, and the self-repairing ability is increased by 50 times. Grinding and polishing monocrystalline silicon wafers, the surface shape is increased by 80%, the material removal rate is increased by 350%, and ...

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Abstract

An iron-containing consolidated abrasive grinding and polishing pad is characterized in that it is mainly composed of abrasives, iron powder and resin uniformly mixed and solidified, and the mass percentage of the abrasive, iron powder and resin is abrasive: iron powder: resin = 5 %-50%: 0.1%-30%: 20%-90%. The invention can not only increase the rigidity of the grinding and polishing pad, improve the surface shape accuracy of the workpiece, but also improve the self-repairing ability of the grinding and polishing pad by cooperating with the grinding and polishing liquid, which is beneficial to the continuous processing process for a long time, and improves the processing efficiency and the stability of the workpiece. Surface Quality.

Description

technical field [0001] The invention relates to a finishing tool, in particular to a grinding and polishing pad for grinding and polishing, in particular to an iron-containing solid abrasive grinding and polishing pad. [0002] Background technique [0003] It is predicted that the scale of the global LED lighting market will reach US$12 billion in 2012, and the demand for handheld household appliances will grow strongly. Therefore, the market for sapphire substrate materials and glass display screens is optimistic. The United States, China and other countries have successively launched nuclear fusion power generation projects. Among them, only in the "National Ignition Project" of the United States, the amount of optical components has reached more than 40,000. Optical components are also widely used in weapon precision guidance systems, space remote sensing systems, and all-solid-state lasers. display and medical systems, etc. Among the above products, a large number of ...

Claims

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Application Information

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IPC IPC(8): B24D3/34B24D3/00
Inventor 朱永伟李军左敦稳唐晓潇叶剑锋李标孙玉利
Owner NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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