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In-situ quasi synchronous detection method for detecting physicochemical properties of micro and nano structures

A micro-nano structure, quasi-synchronous technology, applied in the direction of measuring devices, scanning probe microscopy, instruments, etc., can solve the problems of high restrictions on the measured materials, restrictions on popularization and application, and easily damaged samples and probes. Achieve the effect of improving the efficiency of analysis and testing, facilitating popularization and use, and reducing restrictions

Inactive Publication Date: 2012-12-19
HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The above-mentioned STM-MS-based methods provide an important means for in-situ (quasi) simultaneous fixed-point analysis of the physical properties and chemical compositions of the mutual "registration" of the micro-nano structures of materials, but these research work still have the following deficiencies : The use of STM that needs to work in a high-vacuum environment has high requirements for the material to be tested; the sampling method is complicated, and it is easy to damage the sample and probe; the high-resolution MS is used to detect chemical components, which is expensive
These shortcomings restrict the popularization and application of this method in the in situ (quasi) simultaneous analysis of the physical properties and chemical composition of the micro-nano structure of materials.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0022] Example 1 Detection of surface physical and chemical properties of lung cancer cells

[0023]1. Improve the ordinary AFM probe of atomic force microscope to have corona discharge function:

[0024] The V-shaped silicon nitride probe of the atomic force microscope is selected. The micro-cantilever beam is about 200um long, 30um wide, 0.6um thick, and the half-opening angle is 36 degrees. The diameter of the probe tip is about 10nm. The micro-cantilever beam and the probe tip Constitute the AFM probe. Platinum electrodes and lead wires are placed on the silicon tip side of the AFM probe to obtain an AFM probe with conductive function. The lead wires on the AFM probe holder are connected to the DC high voltage through two rectifier resistors with a resistance of 100 kΩ and 1 kΩ. The positive pole of the power supply, the sample and the sample stage are grounded, and the voltage range of the DC high voltage power supply is 0-6kv.

[0025] 2. Place the biological sample lu...

Embodiment 2

[0029] Example 2 Detection of physical and chemical properties of solar cell material CIGS (copper indium gallium selenide)

[0030] 1. Use the heavy doping process to improve the commercial AFM probe provided by Budget Sensors, so that it has the function of corona discharge. The lead wire is connected to the positive pole of the DC high-voltage power supply through two rectifying resistors with a resistance value of 100 kΩ and 1 kΩ, the sample and the sample stage are grounded, and the voltage range of the DC high-voltage power supply is 0-6000v;

[0031] 2. Place the solar cell material CIGS sample on the AFM workbench, and use the atomic force microscope to observe the surface physical morphology of the nanomaterial sample online;

[0032] 3. Aim the AFM probe at the point on the sample where the chemical characteristics need to be analyzed, adjust the micro-motion stage and the sample stage so that the distance between the probe tip and the sample is 200 microns, and then...

Embodiment 3

[0035] Example 3 Detecting the surface physical and chemical properties of Escherichia coli antigen-antibody conjugates

[0036] 1. Use MEMS technology to improve the AFM probe of ordinary tapping mode of atomic force microscope, so that it has corona discharge function;

[0037] 2. Use AFM to observe the surface morphology of the O157:H7 antibody sample, and then apply a layer of sediment containing Escherichia coli (such as O157:H7) to the surface of the target substance sample such as the O157:H7 antibody. Specific binding, the target bacteria interact with the antibody to form an antigen-antibody complex on the surface, use AFM to scan the surface to determine the position of the surface antigen-antibody complex by detecting the interaction between molecules, and obtain the surface physical properties of the complex;

[0038] 3. Adjust the sample stage so that the distance between the probe tip and the sample is 50 microns, apply a high voltage of 900v to the AFM probe ti...

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Abstract

The invention relates to a method for detecting physicochemical properties of micro and nano structures on the surface of a material, in particular to an in-situ quasi synchronous detection method for detecting physicochemical properties of micro and nano structures by adopting an atomic force microscope-ion migration spectrometer (AFM-IMS) or atomic force microscope-high-field asymmetric waveform ion mobility spectrometer (AFM-FAIMS) combined technology under the atmospheric environment. The method comprises the following steps of: scanning and imaging a detected sample on an atomic force microscope (AFM) to acquire physical property data, desorbing the chemical substances of the sample by using corona discharge, ionizing the chemical substances into charged ions, sending the charged ions to an ion migration spectrometer (IMS) or a high-field asymmetric waveform ion mobility spectrometer (FAIMS) in a mode of migrating the electric field or using artificial airflow by using a micro electromechanical interface device, performing separation and detection, and determining the chemical components. The method can directly correspondingly analyze the physical properties of the sample and the chemical components, and has in-situ (quasi) synchronous fixed point analysis function of the micro and nano structures; and the whole process is performed under the atmospheric environment, themethod has low limit on the sample, the analysis efficiency and the test efficiency are greatly improved, the operation is convenient and flexible, the volume cost is low, and the method is convenient for popularization and application in the field of material analysis and test.

Description

technical field [0001] The invention relates to a method for detecting the physical properties and chemical components of the surface of a solid material with a micro-nano structure, in particular to a detection method using an atomic force microscope and an ion mobility spectrometer or a high-field asymmetric waveform ion mobility spectrometer (AFM-IMS) in an atmospheric environment. Or AFM-FAIMS) combined technology, a method for in-situ quasi-simultaneous detection of physical properties and chemical components of micro-nano structures. Background technique [0002] Realizing the in-situ quasi-simultaneous analysis of the physical properties and chemical composition of the micro-nano structure of materials is a key scientific and technological issue in the research of new materials, new structures, new devices and new properties at the micro-nano scale. In-situ (quasi-)synchronous characterization of the physical properties and chemical composition of materials requires t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01Q60/24G01N27/68
Inventor 孔德义赵贵程玉鹏陈池来李庄刘英李加伟唐敏殷世平王焕钦
Owner HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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