Coaxial Fizeau synchronous phase shifting interferometer capable of adjusting extended light illumination
A technology of expanding light source and synchronizing phase shifting, applied in instruments, scientific instruments, measuring optics, etc., can solve the problems of large instrument structure, difficult miniaturization, large moving range of adjustable mirrors, etc., to achieve convenient operation and reduce volume , to achieve the effect of miniaturization
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[0031] The optical path structure of the "coaxial Fizeau-type synchronous phase-shifting interferometer with adjustable and extended light source illumination" of the present invention is shown in the appendix of the instruction manual. figure 1 ,including,
[0032] 1) The adjustable extended light source module 1 is used to provide an extended light source with an adjustable contour size and a constant central position, and the contour size adjustment range is from a few microns to tens of millimeters. Three possible structures of adjustable extended light source module 1 are shown in the attached manual figure 2 As shown, it includes a laser 20, a diffusing screen 21, an aperture stop 27 and a zoom lens 28; or includes a laser 20, an aperture stop 27, a condenser lens 30 and a diffusing screen 21; or includes a laser 20, a diffusing screen 21 and an adjustable aperture light appendix 22. The scattering screen 21 can be produced by a rotating solid scattering plate such a...
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