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Static actuator and preparation method and instantaneous perturbation resistance method thereof

An electrostatic actuator and moving electrode technology, applied in piezoelectric/electrostrictive/magnetostrictive devices, piezoelectric effect/electrostrictive or magnetostrictive motors, generators/motors, etc. performance impact, device failure, etc., to achieve the effect of improving quality, reducing internal stress, and simplifying the process

Active Publication Date: 2012-04-18
PEKING UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In fact, even a weak transient disturbance may have a significant impact on the performance of the device, and even cause the device to fail

Method used

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  • Static actuator and preparation method and instantaneous perturbation resistance method thereof
  • Static actuator and preparation method and instantaneous perturbation resistance method thereof
  • Static actuator and preparation method and instantaneous perturbation resistance method thereof

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Embodiment Construction

[0031] The electrostatic actuator proposed by the present invention, its preparation method, and anti-transient disturbance method are described as follows in conjunction with the accompanying drawings and examples.

[0032] An electrostatic actuator according to an embodiment of the present invention can be used to reduce the impact of external disturbances on the performance of light processing tips, such as Figure 2(a)-2(c) As shown, the electrostatic actuator provided by the present invention includes: a fixed electrode 1, which is two plate electrodes fixedly connected to lead electrodes 11 on a glass substrate; A plate electrode with a set height h at the bottom; the second movable electrode 3 is a rectangular frame plate electrode, which is arranged on the same plane as the first movable electrode 2, between the fixed electrode 1 and the first movable electrode 2; each fixed One side of the rectangular frame of the second movable electrode 3 is disposed between the ele...

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Abstract

The invention relates to a static actuator and preparation method and instantaneous perturbation resistance method thereof. The static actuator comprises a fixed electrode, a first movable electrode and a second movable electrode, wherein the fixed electrode is a pad-shaped electrode of the lead electrode which is fixedly connected with a substrate; the first movable electrode is a pad-shaped electrode which is arranged above the substrate for a set height; the second movable electrode is rectangular box pad-shaped electrode and is arranged between the fixed electrode and the first movable electrode and on the same plane of the first movable electrode; and the first movable electrode and the second movable electrode are both connected with elastic parts. The static actuator of the invention has technical characteristics of monolithic integration, adaptability and the like and also has high precision positioning and high reliability so as to effectively overcome the impact perturbationintroduced by the external environment, especially the perturbation caused by instantaneous vibration.

Description

technical field [0001] The invention relates to the field of micro-actuators, in particular to an anti-disturbance electrostatic actuator suitable for high-precision optical MEMS devices, a preparation method thereof, and an anti-instantaneous disturbance method. Background technique [0002] Micro-Electro-Mechanical System (MEMS) generally refers to components or systems whose volume or action range is on the micron scale. Different from the traditional machining and manufacturing methods, most of MEMS are compatible with the semiconductor manufacturing process of integrated circuits, including bulk silicon micromachining technology and surface silicon micromachining technology, used to make tiny mechanical components and structures. Due to the advantages of MEMS, such as thin, light and small size, batch manufacturing, and easy creation of high added value, coupled with higher resolution and sensitivity than traditional manufacturing technologies, MEMS-related technologies...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B5/18B81B7/02B81C1/00
Inventor 陈庆华吴文刚杜博超贾鲲鹏张海霞夏雨郝一龙
Owner PEKING UNIV
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