Micro-accelerometer based on silica-based high speed electro-optical modulation of waveguide ring resonator

Abstract

The invention discloses a micro-accelerometer based on silica-based high speed electro-optical modulation of a waveguide ring resonator. The micro-accelerometer comprises an SOI substrate, a mass block, a cantilever, a ring resonator and PN junctions. The SOI substrate is connected with the mass block through the cantilever; the ring resonator is fabricated in the position where the SOI substrateis connected with the cantilever; the ring resonator comprises a straight waveguide and a ring chamber; finally the PN junctions are formed inside and outside the ring chamber. The width of the straight waveguide is 400 nm to 1 micro meter, the diameter of the ring chamber is 10 micro meters to 30 micro meters, and the coupling distance between the straight waveguide and the ring chamber is 200 nm to 500 nm. P areas and N areas are formed by adulterating boron and phosphor inside and outside the ring resonator through ion injection method to form PN junctions. By adopting the resonance effectof the ring resonator and the electro-optic effect of silicon under the strong restraint effect of a small-size waveguide, the micro-accelerometer can achieve a higher modulation speed. The inventionis a micro-accelerometer of the silica-based ring resonator with the advantages of small size structure, high integration level and high modulation speed.

Description

technical field [0001] The invention relates to the field of MOEMS acceleration sensors, in particular to a micro accelerometer based on a silicon-based high-speed electro-optic modulation waveguide ring resonant cavity. Background technique [0002] Micromachined accelerometer (MicroAccelerometer) is one of the representative devices of MEMS. It is known for its small size, light weight and easy integration. It is the core device of the micro-inertial measurement combination. As the performance of micromachined accelerometers improves, applications continue to move toward high precision. Therefore, higher requirements are placed on the performance of the micro-accelerometer. In order to improve the accuracy of the whole system of the micromachine accelerometer, the detection and processing capability of its output light intensity signal is also put forward very high requirements. [0003] The signal-to-noise ratio of the output signal of the micro-accelerometer is very lo...

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Problems solved by technology

[0004] Silicon is a centrosymmetric crystal, and the first-order electro-optic effect is extremely weak. Although the thermo-optic coefficient of silicon is relatively large, due to the limitation of its own thermal conductivity, the modulation frequency of the thermo-optic modulator cannot exceed 1MHz. Therefore, it was once thought that the realization of silicon-based high-speed modulation is impossible

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