Microelectrode array chip sensor for electrochemical immunological detection
A technology of micro-electrode array and chip sensor, which is applied in the field of sensors to achieve the effects of increased area, high response current, and guaranteed insulation performance
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[0031]The present invention will be further described below in conjunction with drawings and embodiments. EXAMPLES On the premise of taking the solution of the present invention as the technical premise, detailed implementation and specific operation process are given, but the protection scope of the present invention is not limited to the examples.
[0032] 1. Thermally oxidize and grow 600nm silicon dioxide on a P-type silicon substrate as an insulating layer.
[0033] 2. Use piranha solution (H 2 SO 4 :H 2 o 2 =3:1) Clean the silicon dioxide surface, wash with deionized water to remove impurities, and dry the silicon wafer; photolithography, use positive resist to form a working electrode pattern, and the radius of the working electrode is 500 μm. Oxygen plasma sputtering base film.
[0034] 3. Sputter PVD 20nm Ti and 300nm Au; use lift-off process to remove photoresist to form working electrode pattern, working electrode radius is 500μm.
[0035] 4. Photolithography,...
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