Method for preparing complaisance type double-layer electric vortex flow sensor for testing curved surface clearance

Abstract

The invention relates to a preparation method of a flexible double-layer eddy-current sensor adopted for measuring the clearance among curved faces, belonging to the sensor technology field. Firstly, apertures are cut on a polyimide film substrate and then the front and back faces of the polyimide film substrate and the apertures are respectively covered by copper foil; the lithography is carried out on the front copper foil to form eddy-current coils around the apertures and outer leads are formed on one side of each eddy-current coil; the lithography is carried out on the back copper foil to form inner leads among the apertures so as to get the upper-layer eddy-current sensor; the process is repeated to get the lower-layer eddy-current sensor; and the sealing glue is adopted to lead the upper-layer and lower-layer eddy-current sensors to be stuck mutually. The eddy-current sensors prepared by the method have high measuring precision and resolving power under the additive effects of electromagnetic field. The eddy-current coils and the substrate material have better flexibility so as to measure the clearance among curved faces of any form, and can be arranged in the narrow space for measurement.

Description

technical field [0001] The invention relates to a preparation method of a flexible double-layer eddy current sensor used for testing the gap between curved surfaces, and belongs to the technical field of sensors. Background technique [0002] The concept of "compliant sensor" can be traced back to the late 1980s. Many special structures in aerospace vehicles have brought great difficulties to the installation of traditional rigid sensors. People hope that the sensor has good flexibility, is not limited by the shape of the object to be measured, and can be attached to various regular or irregular surfaces to achieve normal sensing functions. After entering the 1990s, scientists in the United States, France, Japan, Switzerland, Portugal and other countries began to conduct research on compliant sensors, and many new sensor materials and structures were applied to this research field. [0003] Eddy current testing technology is a non-destructive, non-contact measurement testin...

AI Technical Summary

Problems solved by technology

Since this kind of eddy current coil is integrated on a hard substrate, it cannot be attached to a curved surface, and the processing technology is very complicated and requires high processing conditions.

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