Aurum-nickel doped monocrystalline silicon sheet type negative temperature coefficient heat-variable resistor and method for making same
A negative temperature coefficient, single crystal silicon wafer technology, applied in the direction of resistors with negative temperature coefficient, resistance manufacturing, resistors, etc., can solve the problem of no technical report of single crystal silicon chip thermistor, and achieve low cost , the effect of simple process
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[0025] Adopt n-type Czochralski single-crystal silicon wafer with a resistivity of 1Ω·cm, the crystal plane is (111) plane, the radial distribution of resistivity is ≤±5%. Ultrasonic desanding in deionized water for 5 minutes, ultrasonic degreasing in acetone for 5 minutes, use ammonia water, hydrogen peroxide and deionized water according to the ratio of 1:2:5 to boil for 15 minutes, and then use hot and cold deionization Wash with water for 3-5 times, and finally dehydrate with acetone for later use;
[0026] Place the cleaned silicon wafer flat on the filter paper and use NiCl 2 ·6H 2 The concentration of O is 2.1×10 -4 mol / ml solution and AuCl 3 ·HCl·4H 2 The concentration of O is 1.2×10 -4 The mol / ml solution is mixed at a ratio of 3:1 by volume and dropped on the surface of the silicon wafer, dried under an infrared lamp until the surface becomes a uniform white crystal, diffused at a high temperature in a constant temperature environment, and the diffusion temperat...
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