Aluminium nitride ceramics material and preparation method thereof
A technology of aluminum nitride ceramics and aluminum nitride, which is applied in the field of aluminum nitride ceramic materials and its preparation, can solve the problems of affecting product qualification rate, increasing manufacturing cost, and difficulty in controlling the performance of substrate products, so as to improve production qualification The effect of improving the rate, improving the flatness and improving the sintering activity
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Embodiment 1
[0039] Example 1, Preparation of AlN Ceramic Substrate by Tape Casting Method Adding Nano-alumina
[0040] Raw materials: Ceramic raw materials include AlN powder, Y 2 o 3 Powder, CaCO 3 Powder and Nano Al 2 o 3 (D50=250nm) powder, material mixing and molding organic additives include solvent butanone and absolute ethanol, binder PVB, dispersant castor oil and plasticizer dibutyl phthalate (DBP), polyethylene glycol (PEG).
[0041] AlN ceramic composition formula: AlN, Y 2 o 3 , CaO and nano-Al 2 o 3 The weight percentages are respectively 94.0%, 5.0%, 0.8% and 0.2%. Among them, CaO is actually composed of CaCO 3 Introduce, CaCO 3 The amount added is converted by the weight percentage of CaO in its molecular formula, that is, CaCO 3 The molar addition of CaO is the same as that of CaO.
[0042] Tape casting slurry preparation: according to the composition formula of the above AlN ceramics, using the usual tape casting process, AlN, Y 2 o 3 , CaCO 3 and nano Al ...
Embodiment 2
[0050] Example 2, Preparation of AlN ceramic substrate by tape casting method adding aluminum isopropoxide
[0051] Raw materials: Ceramic raw materials include AlN powder, Y 2 o 3 Powder, aluminum isopropoxide C 9 h 21 AlO 3 , Material mixing and molding organic additives include solvent butanone and absolute ethanol, binder PVB, dispersant castor oil and plasticizers dibutyl phthalate (DBP), polyethylene glycol (PEG).
[0052] AlN ceramic composition formula: AlN, Y 2 o 3 and Al 2 o 3 The weight percentages are respectively 95.0%, 4.5%, 0.5%. Among them, Al 2 o 3 actually made of aluminum isopropoxide C 9 h 21 AlO 3 Introduced, Aluminum Isopropoxide C 9 h 21 AlO 3 The amount of addition is determined by the Al in its molecular formula 2 o 3 The percentage by weight is converted, that is, C 9 h 21 AlO 3 The molar addition amount of Al 2 o 3 2 times the molar amount added.
[0053] Tape casting slurry preparation: according to the composition formula of...
Embodiment 3
[0061] Example 3, Preparation of AlN Ceramics by Dry Press Forming Method Adding Nano-alumina
[0062] Raw materials: Ceramic raw materials include AlN powder, Y 2 o 3 Powder, CaF 2 Powder, nano-alumina powder (D50=200nm), material mixing and molding organic additives include solvent absolute ethanol, binder PVB, dispersant castor oil.
[0063] AlN ceramic composition formula: AlN, Y 2 o 3 , CaF 2 and nano Al 2 o 3 The weight percentages are respectively 96.0%, 2.8%, 0.5% and 0.7%.
[0064] Preparation of mixed materials: according to the composition formula of the above-mentioned AlN ceramics, using the usual dry pressing molding process, AlN, Y 2 o 3 , CaF 2 and nano Al 2 o 3 With a certain weight percentage of absolute ethanol, binder PVB, and dispersant castor oil, use a ball mill to mix for 36 hours to obtain a mixed slurry. The obtained mixed slurry is dried, crushed and granulated to obtain the mixed material, which is set aside. Wherein, the consumption o...
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