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Microstructures, method for producing microstructures, and optical field amplifying device

A technology of micro-structure and photoelectric field enhancement, applied in semiconductor devices, electrical components, instruments, etc., can solve problems such as low absorption efficiency, and achieve the effect of high in-plane uniformity, strong bonding and simple process

Inactive Publication Date: 2008-12-10
FUJIFILM CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The photochemical complexes composed of mixed self-assembled monomolecular films described in Patent Documents 1 and 2 are easy to manufacture, and the light energy absorbed in the complexes is efficiently converted into energy. However, since the film thickness is several nm Monomolecular film, so the absorption efficiency of incident light is extremely low

Method used

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  • Microstructures, method for producing microstructures, and optical field amplifying device
  • Microstructures, method for producing microstructures, and optical field amplifying device
  • Microstructures, method for producing microstructures, and optical field amplifying device

Examples

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Embodiment 1

[0124] In the following procedure, the microstructure 1 of the above-mentioned embodiment was produced.

[0125] As the anodized metal body 10, prepare an aluminum plate (Al purity 99.99%, 10 mm thick), use this aluminum plate as an anode, use aluminum as a cathode, and perform anodic oxidation under the condition that a part of the aluminum plate becomes an aluminum oxide layer 30, and obtain a dielectric substrate. materials and conductors composed of non-anodized parts remaining in anodization. Anodizing is a two-stage anode described in "H.Masuda and M.Sato, Fabrication of Gold Nanodot Array Using Anodic Porous Almina as an Evaporation Mask", J.J.Appl.Phys.Vol.35, pp.L126-L129(1996)" The anodizing process is carried out, and the anodizing conditions and the like are also the same as those described in the above-mentioned documents.

[0126] Next, using the conductor 13 as an electrode, Au is filled in the many micropores 12 of the dielectric base material 11 by plating to...

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Abstract

Manufacture of a microstructure that exhibits electric field amplification effects having high planar uniformity is enabled by a simple process. The microstructure 1 is formed on a conductor (13). The microstructure (1) is equipped with a dielectric base material (11), in which a great number of fine holes (12) having substantially the same shape in plan view are formed. The fine holes (12) are open at the surface (11s) of the dielectric base material (11), and are substantially uniformly provided therein. A plurality of micro metal members (20) are fixed to the dielectric base material (11).The micro metal members (20) include filling portions (21) that fill one or more of the fine holes (12), and protruding portions (22) that protrude from the surface (11s) of the dielectric base material (11) and are of diameters greater than the fine holes (12), capable of inducing local plasmon. The plurality of micro metal members (20) include those that have different numbers of filling portions (21).

Description

technical field [0001] The present invention relates to a microstructure having a metal capable of generating localized plasmons on a dielectric base material with a plurality of micropores on its surface, a method for producing the same, and an optical field enhancement device using the microstructure. Background technique [0002] Currently, research is being conducted on photoelectric mobile devices that effectively utilize solar energy, which is a safe and clean alternative to petroleum and other fossil fuels. As a light energy transfer element capable of efficient energy transfer, a light energy transfer element (artificial photosynthetic element) equipped with a photosynthetic photochemical complex artificially constructed focusing on photosynthesis of plants is expected. [0003] Patent Documents 1 and 2 disclose a light energy transfer element (photoelectric conversion system) equipped with a photochemical system complex composed of a hybrid self-assembled monomolecu...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/65G01N21/64H01M14/00H01L31/04
CPCG01N21/554G01N21/6428G01N21/648G01N21/658Y10T428/24331
Inventor 纳谷昌之
Owner FUJIFILM CORP
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