Silicon nano line/non crystal heterogeneous agglomeration solar battery
A technology of solar cells and silicon nanowires, applied in the field of solar energy, can solve the problems of instability, attenuation of photoelectric conversion efficiency, problems in the stability of amorphous silicon solar cells, etc.
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[0022] The present invention at first adopts the preparation method of the nano-silicon wire array that we propose, at first after the large-area nano-silicon wire array is prepared on the surface of the P-type silicon substrate, a metal aluminum film is deposited on the P-type silicon substrate surface by vacuum evaporation, After sintering, it is used as the back ohmic contact electrode. Then, plasma-enhanced chemical vapor deposition technology is used to deposit n-type hydrogenated amorphous silicon film (α-Si:H) on the surface of p-type silicon nanowires and their arrays to form a silicon nanowire / amorphous silicon three-dimensional radial p-n heterojunction , using magnetron sputtering technology to deposit a layer of indium tin oxide (ITO) transparent conductive film on the surface of silicon nanowire / amorphous silicon three-dimensional heterojunction. Then use the mask method to deposit Ti / Pd / Ag on the surface of the ITO conductive film as the front ohmic contact elect...
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