Chip of overvoltage protector of semiconductor in low capacitance
An overvoltage protector and semiconductor technology, which is applied in the direction of semiconductor devices, semiconductor/solid-state device parts, electric solid-state devices, etc., can solve the problems of square chips producing boundary and edge effects, affecting the transmission efficiency of communication equipment, etc., to achieve overvoltage Good protection effect, increased effective use area, reasonable layout repetition effect
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[0013] From figure 1 figure 2 It can be seen that a low-capacitance semiconductor overvoltage protector chip is circular, and the chip includes an N silicon wafer substrate intermediate layer 6, and the upper and lower sides of the N silicon wafer substrate intermediate layer 6 have "base area 5, Emitting area 2, short-circuit point 1" and "base area 5', emitting area 2', short-circuiting point 1'", the upper and lower groups of components are connected to each other and arranged symmetrically. The etched grooves 3 and 3', the inner wall of the etched groove 3 is provided with a glass passivation layer 7, and the surface of the short circuit point 1, the emitter region 2 and the base region 5 is provided with a metal layer 4. A glass passivation layer 7' is placed on the inner sidewall of the etching groove 3', and a metal layer 4' is placed on the surface of the short circuit point 1', the emitter region 2' and the base region 5'.
[0014] The manufacturing process of the ...
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