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41results about How to "Achieve Optical Image Stabilization" patented technology

Driving structure and optical anti-shake camera

The invention relates to the technical field of camera driving devices, in particular to a driving structure and an optical anti-shake camera. The driving structure comprises a base body, a module body, a module driving component, a deflection component and an anti-shake driving component, wherein the module body is disposed in the base body, and has a fixedly disposed image sensor and a lens moveably disposed relative to the image sensor along an optical axis direction therein; the module driving component is disposed in the module body and connected to the lens, and drives the lens to move toward or away from the image sensor; the deflection component is installed in the base body relative to the movement of the base body, and provided with the module body; and the anti-shake driving component is disposed in the base body, and coupled to the module body for driving the module body to deflect relative to the optical axis. The optical anti-shake camera with the driving structure provided by the invention is higher in imaging quality.
Owner:DONGGUAN PRECISION PHOTONICS LTD

Optical anti-vibration voice coil motor capable of changing tilt shift centre and assembly method thereof

The invention provides an optical anti-vibration voice coil motor capable of changing tilt shift centre, comprising a substrate, at least one elastic sheet, a lens carrier, at least three magnetic body groups and a shell. The pedestal, the shell and the magnetic body groups are connected together to form a fixed structure. The magnetic body groups are arranged in the shell; the lens carrier comprises a main body and coils arranged on the main body. The number of the coils is the same as that of the magnetic body groups. The coils and the magnetic body groups are arranged oppositely one by one. The elastic sheet is connected with the lens carrier and the magnetic body groups to form a multi-variant spring oscillator system with a spring centre. The elastic sheet is electrically connected with the coils. The direction of the electromagnetic resultant force of each coil is not faced to and not back to the spring centre, and is not parallel to an optical axis. By adjusting the size of each resultant force, the motor could be used for controlling the tilt shift of the lens to be tilted and be moved along the optical axis to achieve an optical anti-vibration function and an automatic focusing function. By adopting the above structure, the optical anti-vibration voice coil motor not only is simple in structure, and high in reliability, and reduces production cost, but also could maintain excellent image resolution and resist magnetic disturbance.
Owner:AP PHOTONICS SHEN ZHEN

Camera, optical system and optical image stabilization camera apparatus

InactiveCN105629626AAchieving autofocusAchieve translational anti-shake effectPrintersProjectorsEngineeringOptic system
The invention discloses a camera, an optical system and an optical image stabilization camera apparatus. The optical image stabilization camera apparatus comprises an outer shell, an inner shell, a carrier disposed at least partially in the inner shell, a plurality of elastic elements, and a plurality of kinetic energy conversion devices. The plurality of elastic elements are disposed at least partially between the carrier and the outer shell or between the inner shell and the outer shell to control the movement of the carrier or the inner shell with respect to the outer shell, and the elastic elements are disposed at two ends of the carrier or the inner shell to provide a restoring force. The elastic elements are composed of a plurality of conductive elements, each kinetic energy conversion device is at least connected onto the conductive elements of one elastic element, and the kinetic energy conversion devices can push the carrier to move when a plurality of electric signals are applied to the at least one conductive element of the corresponding elastic element. At least one kinetic energy conversion device can be connected to the carrier and is located in the inner shell and around the carrier. Through free translation in all directions, variations of images caused by translational shake and countershaft moving shake can be greatly reduced, and automatic focusing can be achieved.
Owner:HUIZHOU YOUHUA MICROELECTRONICS TECH

Camera module and terminal equipment

The invention relates to a camera module and terminal equipment. The camera module comprises a lens, a lens base which is used for mounting the lens, and a first magnetostriction piece which comprisesa first magnetostriction sheet and a first magnetic field element, wherein the first magnetic field element is used for generating a magnetic field; and the first magnetostriction sheet is connectedwith the lens base, and the first magnetostriction sheet can warp under the action of the magnetic field generated by the first magnetic field element so as to drive the lens base to deflect or move in the direction perpendicular to the optical axis of the lens. According to the camera module, the first magnetostriction sheet can be warped and deformed under the action of the magnetic field so asto drive the lens base to deflect or move in the direction perpendicular to the optical axis of the lens, so that the camera module has the optical anti-shake capacity. Besides, the first magnetostriction piece deforms only under the action of magnetic fields in a few directions, so that the interference of the magnetic fields in multiple directions in a complex environment can be effectively reduced, and the reliability of the optical anti-shake performance of the camera module is further improved.
Owner:GUANGDONG OPPO MOBILE TELECOMM CORP LTD

Lens seat, lens module and electronic equipment

The invention discloses a lens seat, a lens module and electronic equipment and aims to solve a problem of reduction of reliability of a lens as a precise part because of slight concussion generated in the motion process of the lens driven by a voice coil motor existing in a lens seat in the prior art. The lens seat is used for bearing a lens, the lens seat comprises a light sensing structure, a first side arranged at the light sensing structure and a driving structure connected with the light sensing structure, wherein the first side of the light sensing structure is a side away from the lens, the driving structure is used for driving the light sensing structure to move second displacement after the light sensing structure moves first displacement, the direction of the first displacementis perpendicular to the direction of an optical axis, the direction of the second displacement and the direction of the first displacement are on the same plane, and the direction of the second displacement and the direction of the first displacement are opposite to each other. The lens seat can be applied to the lens module.
Owner:VIVO MOBILE COMM CO LTD

Motor for driving liquid lens and lens group

The present invention relates to a drive device, in particular to a motor for driving a liquid lens and a lens group. The motor comprises a seat body, a carrier, a first resetting member, a sensor anda driving assembly; the carrier is movably disposed in the seat body in a direction towards or away from the liquid lens; the driving assembly comprises a rotor disposed on the carrier and a stator disposed on the base body, and the stator drives the rotor to move up and down along an optical axis and / or to deflect around the optical axis; the first resetting member is disposed on the liquid lensand acts on the carrier when the carrier moves to provide a reset force for restoring an initial position of the carrier; the sensor and the rotor are correspondingly fixedly arranged in the seat body for sensing the displacement of the mover or the change of the magnetic field; the carrier moves to act on the first resetting member, the first resetting member is displaced relative to the liquidlens so as to adjust the curvature of the liquid lens, and when restoring to the initial position, the first resetting member provides the reset force for restoring to the initial position for the carrier. The motor of the present invention has the advantage of precise control of the liquid lens.
Owner:DONGGUAN PRECISION PHOTONICS LTD

Lens assembly

The invention provides a lens assembly. The lens assembly comprises a first substrate, a lens, a first memory alloy wire and a second memory alloy wire, wherein the lens is arranged in the first substrate in a sliding way, the first substrate comprises a first side plate and a second side plate, the first side plate is arranged at one side of the lens, the second side plate is arranged at the other side of the lens, one end of the first memory alloy wire is connected with the first side plate, the other end of the first memory alloy wire is connected with the lens, one end of the second memoryalloy wire is connected with the second side plate, the other end of the second memory alloy wire is connected with the lens, and the first memory alloy wire and the second memory alloy wire both arearranged perpendicular to an optical axis of the lens. In the lens assembly provided by the invention, the lens is driven to move relative to the first side plate and the second side plate in a reciprocating way to achieve optical vibration prevention by enabling the first memory alloy wire and the second memory alloy wire to be energized and deformed, no problem of magnetic interference exists,and the stability is relatively high; and moreover, by a driving setting mode, the lens assembly is simple in structure and is convenient to install, no extra hall component is needed to be arranged,and the lens assembly is high in reliability used under a special environment.
Owner:AAC OPTICS SOLUTIONS PTE LTD

Method for realizing optical anti-shake of camera module

The invention provides an optical anti-shake implementation method of a camera module. The camera module comprises a lens module, an image sensor chip serving as a rotor and a supporting part servingas a stator. The bonding pad of the image sensor chip is electrically connected to the bonding pad of the support part through a plurality of suspension structures. The suspension structure plays a role in supporting the image sensor chip in a suspended manner and electrically connecting the image sensor chip.
Owner:GALAXYCORE SHANGHAI

Area array sweep frequency measurement device and method

The invention provides an area array sweep frequency measurement device and method, and belongs to the technical field of laser ranging. A beam splitter decomposes a converged light beam into reflected light and transmitted light; during use, a measured object reflects the reflected light to form signal light; a reflecting element is used for reflecting the transmitted light; a second dichroscope is used for decomposing the reflected transmitted light into reference light and wide-spectrum light; a spectrograph is used for acquiring spectral information through the decomposed wide-spectrum light; a camera is used for collecting an interference image formed by interference of the signal light and the reference light; an acquisition control unit can analyze the surface topography of the measured object according to the interference image and the compensation information; vibration information is obtained according to the spectral information and used for controlling a piezoelectric ceramic displacement table to move, and compensation information is obtained. Through superposition of a plurality of independent speckles, the effect of reducing the speckle contrast is achieved; meanwhile, an optical anti-shake function is achieved, and the laser ranging accuracy is improved.
Owner:武汉光目科技有限公司

Optical anti-vibration lens assembly and optical anti-vibration method thereof

The invention provides an optical anti-vibration lens assembly and an optical anti-vibration method thereof. The optical anti-vibration lens assembly comprises a first substrate, a lens, a first memory alloy wire and a second memory alloy wire, wherein the lens is positioned inside the first substrate; the first substrate comprises a first side plate and a second side plate which are positioned on two sides of the lens; the first memory alloy wire comprises a first fixed end and a third fixed end which are fixed to the first side plate, a second fixed end fixed to the lens, a first extended section for connecting the first fixed end and the second fixed end, and a second extended section for connecting the third fixed end and the second fixed end; and the second memory alloy wire comprises a fourth fixed end and a sixth fixed end which are fixed to the second side plate, a fifth fixed end fixed to the lens, a third extended section for connecting the fourth fixed end and the fifth fixed end, and a fourth extended section for connecting the sixth fixed end and the fourth fixed end. The optical anti-vibration lens assembly provided by the invention has the advantages that the structure for realizing optical anti-vibration is simple and miniaturization design can be realized.
Owner:AAC OPTICS SOLUTIONS PTE LTD

Optical element driving mechanism

The invention discloses an optical element driving mechanism comprising an upper cover, an upper reed, a magnet group, a carrier, a lower reed, a base, a ball, a bottom circuit board and a base, the carrier and the upper cover are movably connected by the upper reed, the carrier and the base are movably connected by the lower reed, and the bottom circuit board is installed on the base and is fixedly connected with the base. The substrate is used for mounting a chip and is movably connected with the base through a ball, the carrier is provided with a first group of coils, the bottom circuit board is provided with a second group of coils, and the magnet group is fixedly mounted on the upper cover and is matched with the first group of coils to drive the carrier to move and is matched with the second group of coils to drive the substrate to move. According to the invention, optical zooming and optical anti-shake are realized through movement of different parts, and the problem of picture blurring caused by hand shaking in the shooting process is solved.
Owner:HENAN HAOZE ELECTRONICS

Ultra-thin voice coil motor and camera

The invention relates to the technical field of camera driving devices, in particular to an ultra-thin voice coil motor and a camera. The ultra-thin voice coil motor comprises a shell, a bracket, a lens holder, a first rotor, a second rotor and a stator, and the bracket can be arranged in the shell movably relative to the shell; the lens holder can be connected with the bracket movably relative tothe bracket and is used for installing a lens; the first rotor is fixedly arranged on the lens holder, and the first rotor movably drives the lens holder to move; the second rotor is arranged on thebracket corresponding to the first rotor and is used for driving the first rotor to move, and the second rotor movably drives the bracket to move; the stator is fixedly arranged in the shell corresponding to the second rotor and is used for driving the second rotor to move; and the second rotor is located between the first rotor and the stator. The ultra-thin voice coil motor in the invention hasthe advantages of being more compact in structure and low in height.
Owner:DONGGUAN PRECISION PHOTONICS LTD

Lens group

The invention relates to a driving device, and particularly relates to a motor used for driving a liquid lens and a lens group. The motor comprises a base, a supporting frame, a carrier and a drivingassembly, the base is used for fixedly installing a first lens and the liquid lens which are distributed along an optical axis and are correspondingly arranged; the carrier can be movably arranged inthe base facing towards or away from the liquid lens; the driving assembly comprises a motor arranged on the carrier and a stator arranged on the base, the stator drives the rotor to move up and downalong the optical axis and / or move deflecting from the optical axis; the supporting frame is arranged close to the carrier and is movably connected with a moving plate of the liquid lens; the carriercan be in butt joint with the supporting frame; the rotor drives the carrier to move the driving supporting frame, the moving plate is driven to move by the supporting frame to adjust the curvature ofthe liquid lens, and restoring force is provided for the carrier to allow the carrier to return to an initial position when the moving plate restores to an initial state. The motor has the advantagesthat the components are less, the structure is simple, and the driving power consumption is low.
Owner:DONGGUAN PRECISION PHOTONICS LTD

Optical element driving device

The invention discloses an optical element driving device. The optical element driving device comprises a shell, a carrier, an upper reed, a lower reed, a magnet group and a base. The carrier is usedfor installing a lens and is provided with a first coil and a second coil. The magnet group is arranged on the inner wall of the shell and is correspondingly matched with the first coil and the secondcoil on the carrier. The base comprises a bottom plate and a protruding part extending from the bottom plate to the top of the shell. The upper reed enables the upper surface of the carrier to be movably connected with the end face of the protruding part of the base, the lower reed enables the lower surface of the carrier to be movably connected with the bottom plate of the base, the base is further provided with a base embedded metal sheet, and the base embedded metal sheet enables the first coil and the second coil to be connected with an external circuit. The optical element driving devicehas the advantages of being simple in structure, low in cost, high in reliability and the like.
Owner:HENAN HAOZE ELECTRONICS

Motor and lens group for driving liquid lens

PendingCN109581649APrecise adjustment of curvatureUniform deformationPrintersProjectorsOptical axisEngineering
The invention relates to a driving device, and particularly relates to a motor and a lens group for driving a liquid lens. The motor comprises a base, a carrier, a drive assembly, and a first reset component. The drive assembly comprises a rotor disposed on the carrier, and a stator disposed on the base. The stator drives the rotor to move up and down along an optical axis and / or deflect around the optical axis. The first reset component is disposed on the liquid lens and abuts against the carrier when the carrier moves to provide a reset force for the carrier to return to an initial position.The rotor comprises a first set of coils and a second set of coils. The stator comprises a first set of magnets corresponding to the first set of coils and a second set of magnets corresponding to the second set of coils. A force deviating from the optical axis direction is generated when the first group of coils is energized, so that the carrier moves away from the optical axis direction. A force parallel to the optical axis is generated when the second set of coils is energized, so that the carrier moves in the optical axis direction. The first reset component is driven to move relative tothe liquid lens when the carrier moves, and curvature of the liquid lens is adjusted.
Owner:DONGGUAN PRECISION PHOTONICS LTD

Ultrasonic piezoelectric motor, camera module and electronic equipment

The invention discloses an ultrasonic piezoelectric motor, a camera module and electronic equipment. The ultrasonic piezoelectric motor comprises a support, a carrier and a Z-direction piezoelectric actuator, the carrier is installed on the inner side of the support and can move in the Z direction relative to the support, the carrier is used for installing a lens, and the Z direction is parallel to the optical axis of the lens; the Z-direction piezoelectric actuator is located between the support and the carrier, the Z-direction piezoelectric actuator comprises a Z-direction base block, a Z-direction extension block and a Z-direction contact block which are stacked, the Z-direction base block is fixed to the support, the Z-direction base block is used for deforming according to a first electric signal to drive the Z-direction contact block to abut against or leave the carrier, and the Z-direction extension block is used for deforming according to a second electric signal to drive the Z-direction contact block to move along the Z direction. The ultrasonic piezoelectric motor periodically abuts against the carrier through the Z-direction contact block of the Z-direction piezoelectric actuator and drives the carrier to move in the Z direction so that automatic focusing of the camera module is achieved.
Owner:HUAWEI TECH CO LTD

Image sensing module, lens module and mobile terminal

The invention provides an image sensing module, a lens module and a mobile terminal. The image sensing module comprises an image sensor and a support for supporting the image sensor, and the image sensing module further comprises a plurality of magnetostrictive moving mechanisms fixedly connected with the support and a supporting mechanism for supporting the magnetostrictive moving mechanisms; each magnetostrictive moving mechanism comprises a magnetostrictive film with one end connected with the support and a driving coil for driving the magnetostrictive film to deform and stretch, the otherend of the magnetostrictive film is connected with the supporting mechanism, and the driving coil surrounds the magnetostrictive film. A plurality of magnetostrictive moving mechanisms are distributedon the periphery of a support; the magnetostrictive film of each magnetostrictive moving mechanism is connected with the support, and the driving coil surrounding the magnetostrictive film is arranged, so that an induced magnetic field is generated through the driving coil to drive the corresponding magnetostrictive film to stretch and deform so as to drive the support to move and further drive the image sensor to move; and the image sensing module is simple and is small in size.
Owner:GUANGDONG OPPO MOBILE TELECOMM CORP LTD

Circuit board, camera module and mobile terminal

The invention relates to a circuit board and a camera module, and the first board body of the circuit board can slide under the action of a driving force, thereby driving a photosensitive chip to displace relative to a lens assembly, and achieving optical anti-vibration. The output pin of the second board body of the circuit board can be electrically connected with the mainboard of the mobile terminal, and the second board body is fixed on the base. When the first plate body moves, the position of the second plate body can be kept fixed, so that no pulling is generated between the second plate body and the main plate. Therefore, each joint is effectively prevented from being loosened due to pulling force. Furthermore, the connecting piece can deform along with the movement of the first plate body, so that the movement of the first plate body cannot be limited. Therefore, the resistance borne by the first board body of the circuit board in the sliding process is small. The camera module has relatively high reliability while realizing optical anti-shake. In addition, the invention also provides a mobile terminal.
Owner:NANCHANG O FILM OPTICAL ELECTRONICS TECH CO LTD

Periscopic continuous optical variable module and corresponding multi-camera module

The invention relates to a periscopic continuous light change module, which comprises a fixed optical assembly comprising a reflective element, and a first optical axis and a second optical axis which are perpendicular to each other are respectively arranged on one side of incident light and one side of emergent light of the reflective element; a first moving optical assembly comprises at least two first lenses and a first driver for driving the first lenses to translate along the second optical axis; a second moving optical assembly comprises at least two second lenses and a second driver for driving the second lenses to translate along the second optical axis, and the second moving optical assembly is located at the rear end of the first moving optical assembly; a light sensing assembly comprises a base, a circuit board, a light sensing chip and a third driver, the third driver is located between the light sensing chip and the base, and the third driver is used for driving the light sensing chip to move in at least one direction. The invention further provides a corresponding multi-camera module. According to the invention, the optical anti-vibration of the periscopic continuous optical variable module can be realized at a relatively low space cost.
Owner:NINGBO SUNNY OPOTECH CO LTD

Optical driving device, imaging device, and electronic apparatus

The invention relates to an optical driving device, an imaging device, and an electronic apparatus. The optical driving device comprises a fixed outer frame and further comprises an anti-shake middle frame located in the fixed outer frame. The anti-shake middle frame is rotationally connected with the fixed outer frame, and the anti-shake middle frame rotates around the X axis; the outer wall of the anti-shake middle frame is provided with an avoiding structure which prevents the anti-shake middle frame from making contact with the inner wall of the fixed outer frame when the anti-shake middle frame rotates around the X axis; an inner spherical bracket is positioned in the anti-shake middle frame; the inner spherical bracket is spherical in appearance and is used for bearing an optical component; the inner spherical bracket is rotationally connected with the anti-shake middle frame and rotates around the Y axis; the anti-shake middle frame driving mechanism drives the anti-shake middle frame to rotate around the X axis; the inner spherical support driving mechanism drives the inner ball support to rotate around the Y axis. The wide-angle moving optical driving device is matched with the visual angle of the lens, the visual angle of the wide-angle moving optical driving device can cover 175 degrees, and the optical anti-shake effect of static camera shooting and the tracking effect of dynamic camera shooting can be achieved at the same time.
Owner:NEW SHICOH MOTOR CO LTD

Optical driving assembly

The invention relates to an optical driving assembly. The optical driving assembly comprises an optical element with an optical axis, an optical sensor arranged along the optical axis with the optical element, and a driving module for driving the optical sensor to translate in a direction perpendicular to the optical axis. The driving module comprises: a fixed part having a first movable cavity; a movable part arranged in the first movable cavity, wherein the movable part is movably connected with the fixed part in the first direction, and a second movable cavity is formed in the movable part; a bearing part arranged in the second movable cavity, wherein is movably connected with the movable part in the second direction and bears the optical sensor; a first driving assembly comprising a first shape memory alloy wire which is connected with the fixed part and the movable part respectively; and a second driving assembly comprising a second shape memory alloy wire which is respectively connected with the movable part and the bearing part. Through the above mode, the optical sensor performs linear motion on the vertical optical axis in two directions, optical anti-vibration is realized, and the motion in the two directions is independently controlled and does not influence each other.
Owner:CHANGZHOU RAYTECH OPTRONICS CO LTD

Lens driving device with shake compensation function, camera and electronic device

The invention relates to a lens driving device with a shake compensation function, and the device comprises a base, a focusing part arranged on the base and supported by the base, an outer cover covering the periphery of the focusing part, and a shake compensation driving device arranged between the focusing part and the base or the outer cover. The device is characterized in that the focusing part is movably connected with the outer cover or the base through a connecting assembly; the focusing part is used for bearing an optical lens and realizing a focusing function; the connecting assembly comprises a friction supporting pair which is arranged on the base and is used for bearing the focusing part and enabling the focusing part to be connected with the base in a sliding manner, and a reed which is used for elastically connecting the outer cover or the base with the focusing part; the connecting assembly allows the focusing part to move relative to the base in the direction perpendicular to the optical axis of the optical lens. According to the lens driving device with the shake compensation function, a brand new lens driving structure different from a traditional suspension scheme and an SMA scheme is adopted, optical anti-shake is achieved, and the lens driving device has the advantages of being excellent in anti-shake function, stable and reliable in effect and easy to assemble.
Owner:HUIZHOU YOUHUA MICROELECTRONICS TECH

Device and method for area array frequency scanning distance measurement/thickness with active optical anti-shake function

The invention discloses an area array scanning ranging / thickness device with an active optical anti-shake function, belonging to the field of ranging / thickness, including first and second dichroic mirrors, a beam splitter, a telecentric lens, a camera, A spectrometer, an acquisition control unit and a movable reflective device, a beam splitter is arranged in the transmitted light direction of the first dichroic mirror, an object stage is arranged in the reflected light direction of the beam splitter, and a movable beam splitter is arranged in the transmitted light direction The reflective device, the beam splitter has four ports, the first port and the third port are located on two opposite sides, the first port faces the first dichroic mirror, the second port faces the stage, and the third port Facing the movable reflector, a second dichroic mirror is arranged in the direction of the fourth port, a telecentric lens is arranged in the direction of the transmitted light of the second dichroic mirror, the telecentric lens is connected with a camera, and the second dichroic mirror A spectrometer is arranged in the direction of the reflected light, and the spectrometer is connected to the acquisition control unit. The device of the invention has the advantages of simple structure, quick measurement and high measurement precision.
Owner:HUAZHONG UNIV OF SCI & TECH

Implementation method of metal cantilever beam structure

The invention provides an implementation method of a metal cantilever beam structure. The implementation method comprises the following steps: providing a mold with a concave-convex structure on the surface; electroplating or chemically plating a layer of metal film, or adhering a layer of metal film on the surface of the concave-convex structure of the mold, and forming the metal film on the surface of the concave-convex structure through external force; providing a semiconductor substrate, and forming a metal circuit layer and metal contact points on the front surface of the semiconductor substrate; integrally attaching the mold and a metal film to the front surface of a semiconductor substrate; wherein the metal film is attached to and electrically connected with the metal contact points; removing the mold; and removing partial region of the suspended metal film to form a metal cantilever beam structure.
Owner:GALAXYCORE SHANGHAI

Imaging module and manufacturing method thereof

The invention discloses an imaging module and a manufacturing method thereof. The imaging module comprises a moved element; a space is defined by the at least one supporting block, and the at least one supporting block is hung above the space by the moving element; the piezoelectric elements are distributed on the periphery of the moved element, each piezoelectric element comprises a movable end and a fixed end, the fixed ends are fixed to the supporting blocks, and at least parts of the movable ends are located in the limiting grooves; the at least two piezoelectric elements are distributed on the periphery of the moved element; one end of the connecting arm is connected with the moved element and the other end is connected with the limiting groove; the transverse movement limiting part comprises a first side wall and a second side wall which are located on the two sides of the connecting arm, and the first side wall and the second side wall are distributed in the radial direction parallel to the moved element; and the external signal connecting end is electrically connected with an electrode in the piezoelectric element, and when the piezoelectric element is in a power-on state, the movable end drives the moved element to move upwards or downwards through the connecting arm.
Owner:NINGBO SEMICON INT CORP

Amplified area array sweep frequency ranging/thickness measuring device and method with active optical anti-shake function

The invention discloses an amplified area array sweep frequency ranging / thickness measuring device with an active optical anti-shake function, and relates to the field of laser sweep frequency ranging. The device comprises a first dichroscope, a second dichroscope, a beam splitter, a lens, a camera, a spectrograph, an acquisition control unit and a movable reflection device;a beam splitter is arranged in the transmission light direction of the first dichroscope; an objective table is arranged in the reflected light direction of the beam splitter, a lens is arranged between the objective table and the beam splitter, the beam splitter is provided with four ports, the first port directly faces the first dichroscope, the second port directly faces the lens, the third port directly faces the movable reflection device, the fourth port directly faces the second dichroscope, and a camera is arranged in the light transmission direction of the second dichroscope. The camera is connected with the collection control unit, the spectrograph is arranged in the reflected light direction of the second dichroscope, the spectrograph is communicated with the collection control unit, and the collection control unit has the functions of collecting signals of the camera and the spectrograph and displaying data. The device is simple in structure, rapid in measurement and high in measurement precision.
Owner:HUAZHONG UNIV OF SCI & TECH
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