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Substrate processing apparatus

a processing apparatus and substrate technology, applied in the direction of electrical equipment, semiconductor/solid-state device manufacturing, basic electric elements, etc., can solve the problems of increasing the amount of chemical solutions, the inability to remove foreign objects from the substrate, and the inability to secure satisfactory processing speed, etc., to prevent the structure of each of the processing chambers from being complicated or restrained

Inactive Publication Date: 2014-09-25
DAINIPPON SCREEN MTG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The patent text describes a substrate processing method that uses a chemical solution containing an etching component and a thickening agent. The chemical solution is supplied to the substrate and then transferred to another location on the substrate. This allows the substrate to hold the chemical solution and maintain its viscosity even if the chemical solution is no longer being supplied. The thickening agent increases the viscosity of the chemical solution, reducing its flowability. The method also helps to lift off foreign particles and remove them from the substrate using the etching component. The substrate processing method can effectively remove foreign particles and promote a reaction between the substrate and the chemical solution. The thickening agent used in the method includes methylcellulose, carboxymethyl cellulose, polyethylene glycol, sodium polyacrylate, and polyvinyl alcohol.

Problems solved by technology

However, the consumption of the chemical solution will be increased if the chemical solution continues being discharged from the nozzle.
However, in this cleaning method, foreign matters cannot be sometimes removed from the substrate if adhesion of the foreign matters to the upper surface of the substrate is extremely firm.
However, in this method, the chemical solution contiguous to the substrate is not replaced by a new chemical solution, and therefore there is a case in which much time is consumed to allow the substrate and the chemical solution to sufficiently react together, and hence a satisfactory processing speed cannot be secured.

Method used

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Examples

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first embodiment

[0035]FIG. 1 is a illustrated plan view showing a layout of a substrate processing apparatus 1 according to a first embodiment of the present invention.

[0036]The substrate processing apparatus 1 is a substrate processing apparatus of the single-substrate processing type that processes circular substrates W, such as semiconductor wafers, one by one by use of a processing liquid, such as a chemical solution or a rinsing liquid. The substrate processing apparatus 1 includes an indexer block 2, a processing block 3 joined to the indexer block 2, and a control device 4 that controls the operation of devices provided in the substrate processing apparatus 1 or controls the opening and closing of valves.

[0037]The indexer block 2 includes a carrier holding section 5, an indexer robot IR (substrate transfer unit), and an IR moving mechanism 6. The carrier holding section 5 holds carriers C that can contain a plurality of substrates W. The carriers C are held by the carrier holding section 5 i...

second embodiment

[0072]Next, a second embodiment of the present invention will be described.

[0073]A main difference between this second embodiment and the first embodiment mentioned above is that a foreign-matter measuring unit 40 that measures the position of foreign matters adhering to a substrate W is provided in a substrate processing apparatus 201. Additionally, a chemical solution is supplied into a region determined for each substrate W (i.e., a region in which foreign matters are contained) in the second embodiment, whereas a chemical solution is supplied into a predetermined region (i.e., the peripheral portion of the upper surface of a substrate W) in the first embodiment. In FIG. 8 to FIG. 10, the same reference character as in FIG. 1 and in the other figures is given to a component equivalent to that of FIG. 1 to FIG. 7, and a description of the component equivalent thereto is omitted.

[0074]FIG. 8 is a illustrated plan view showing a layout of the substrate processing apparatus 201 accor...

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Abstract

A substrate processing apparatus includes a first processing chamber and a second processing chamber, a first substrate holding unit that holds a substrate in the first processing chamber, a chemical solution supply unit that supplies a chemical solution containing an etching component and a thickening agent to the substrate held by the first substrate holding unit, a substrate transfer unit that transfers the substrate from the first processing chamber to the second processing chamber in a state in which the chemical solution is held on the substrate, and a second substrate holding unit that holds a plurality of substrates on each of which the chemical solution is held in the second processing chamber.

Description

BACKGROUND OF THE INVENTION[0001]1. Field of the Invention[0002]This invention relates to a substrate processing apparatus and a substrate processing method for processing substrates. Examples of substrates to be processed include semiconductor wafers, substrates for liquid crystal displays, substrates for plasma displays, substrates for FEDs (Field Emission Displays), substrates for optical disks, substrates for magnetic disks, substrates for magneto-optical disks, substrates for photomasks, ceramic substrates, and substrates for solar cells.[0003]2. Description of Related Art[0004]A substrate, such as a semiconductor wafer or a glass substrate for a liquid crystal display device, is processed by use of a processing liquid in a production process in which a semiconductor device, a liquid crystal display device, or the like is produced.[0005]For example, Japanese Published Unexamined Patent Application No. 2007-318016 discloses a substrate processing apparatus of the single-substrat...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): H01L21/67
CPCH01L21/67028H01L21/67051H01L21/67075H01L21/67167H01L21/67253H01L21/6708H01L21/302
Inventor AZUMA, TOMOYUKIYAMADA, KENJIARAKI, HIROYUKIANDO, KOJI
Owner DAINIPPON SCREEN MTG CO LTD
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