Substrate processing apparatus
a processing apparatus and substrate technology, applied in the direction of electrical equipment, semiconductor/solid-state device manufacturing, basic electric elements, etc., can solve the problems of increasing the amount of chemical solutions, the inability to remove foreign objects from the substrate, and the inability to secure satisfactory processing speed, etc., to prevent the structure of each of the processing chambers from being complicated or restrained
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first embodiment
[0035]FIG. 1 is a illustrated plan view showing a layout of a substrate processing apparatus 1 according to a first embodiment of the present invention.
[0036]The substrate processing apparatus 1 is a substrate processing apparatus of the single-substrate processing type that processes circular substrates W, such as semiconductor wafers, one by one by use of a processing liquid, such as a chemical solution or a rinsing liquid. The substrate processing apparatus 1 includes an indexer block 2, a processing block 3 joined to the indexer block 2, and a control device 4 that controls the operation of devices provided in the substrate processing apparatus 1 or controls the opening and closing of valves.
[0037]The indexer block 2 includes a carrier holding section 5, an indexer robot IR (substrate transfer unit), and an IR moving mechanism 6. The carrier holding section 5 holds carriers C that can contain a plurality of substrates W. The carriers C are held by the carrier holding section 5 i...
second embodiment
[0072]Next, a second embodiment of the present invention will be described.
[0073]A main difference between this second embodiment and the first embodiment mentioned above is that a foreign-matter measuring unit 40 that measures the position of foreign matters adhering to a substrate W is provided in a substrate processing apparatus 201. Additionally, a chemical solution is supplied into a region determined for each substrate W (i.e., a region in which foreign matters are contained) in the second embodiment, whereas a chemical solution is supplied into a predetermined region (i.e., the peripheral portion of the upper surface of a substrate W) in the first embodiment. In FIG. 8 to FIG. 10, the same reference character as in FIG. 1 and in the other figures is given to a component equivalent to that of FIG. 1 to FIG. 7, and a description of the component equivalent thereto is omitted.
[0074]FIG. 8 is a illustrated plan view showing a layout of the substrate processing apparatus 201 accor...
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