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Tilt minimization through intensity control of light source

a technology of intensity control and light source, applied in the field of optical metrology, can solve the problem that the detector cannot experience total saturation during the process of finding focus, and achieve the effect of removing the tilt of the sampl

Inactive Publication Date: 2013-11-28
BRUKER NANO INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The invention aims to eliminate tilt in a sample being measured. By setting the intensity of the light source to a level that causes saturation of the detector and then adjusting the intensity to maintain saturation as the tilt position of the sample changes, the no-tilt position of the sample can be determined. This is useful in microscope applications where tilt can result in energy loss.

Problems solved by technology

As a result of this approach, the detector cannot experience total saturation during the process of finding focus, a recurring problem with prior-art procedures.

Method used

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  • Tilt minimization through intensity control of light source

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Embodiment Construction

[0017]The term “image depth,” as used herein, is intended to refer to the range of scanner positions within which the image of the sample is visible during a vertical scan of an interferometer. The term “depth of focus” refers to the range of scanner positions within which the sample is in focus during the vertical scan of the interferometer. The term “depth of fringes” refers to the range of scanner positions within which interferometric fringes produced by the sample are visible during the vertical scan of the interferometer.

[0018]Referring to the figures, wherein like parts are referenced with the same numerals and symbols, FIG. 1 represents schematically a Z-scanning interferometer 10 with a microscope objective 12 and a sample stage 14 capable of relative translation in the X and Y plane (in a single direction, or in serpentine or raster fashion, as the need may be) to acquire images of multiple portions of a sample surface 16. As used herein, X and Y refer to the plane coordin...

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Abstract

The power input to the light source of a microscope is varied as necessary to maintain a constant degree of detector saturation as the objective is moved toward a best-focus position. Focus is found by tracking the source's intensity necessary to maintain the detector irradiance at a constant level. The in-focus position is reached when the power input (and correspondingly the intensity of the light emitted by the source) reaches a minimum. The concept can be applied in a similar manner to minimize or eliminate tilt in a sample.

Description

RELATED APPLICATIONS[0001]This application is a divisional application of U.S. Ser. No. 12 / 964,532, filed Dec. 9, 2010.BACKGROUND OF THE INVENTION[0002]1. Field of the Invention[0003]This invention pertains to the general field of optical metrology. In particular, it pertains to a novel method and apparatus for assisting the manual or automated process of finding best focus for an imaging optical system.[0004]2. Description of the Prior Art[0005]The process of placing a sample in optimal focal position for imaging purposes, such as for interferometric measurements, is well understood and has been implemented using a variety of approaches that are typically based on finding the position corresponding to maximum irradiance at the detector. However, the depth of focus of an imaging optical system such as an interferometric objective is often greater than the depth of fringes produced by it. Therefore, the sample may be in focus and exhibit a high level of irradiance at the detector eve...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): G01B11/26
CPCG01B11/26G02B7/38G02B21/244
Inventor FARRELL, COLIN
Owner BRUKER NANO INC
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