Thin film transistor manufacturing method and substrate structure

Abstract

A method of TFT (Thin Film Transistor) manufacturing and a substrate structure are provided. The structure includes a substrate and a self-alignment mask. A self-alignment mask on a substrate is first manufactured and then the self-alignment mask may synchronously extend with the substrate during the thermal process. When an exposure light source is provided on the side without a TFT formed, the self-alignment mask can overcome the problem that when a plastic substrate extends, the positions of the source and drain to be formed on the plastic substrate are incorrect, which has a great effect on the accuracy of alignment. As the result, the positions of the source and drain can be defined accurately.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS[0001]This is a division of U.S. application Ser. No. 11 / 491,192, filed Jul. 24, 2006, which claimed Priority from Taiwanese application No. 094131733, filed Sep. 14, 2005, the entire disclosure of which is incorporated herein by reference.BACKGROUND[0002]1. Field of Invention[0003]The invention relates to a method of manufacturing a thin film transistor and a substrate structure thereof.[0004]2. Related Art[0005]In recent years, the use of computers and the internet has provided another access to information. People have become more familiar with gaining their information from computers rather than books. However, the way people used to read is not easy to change; therefore paper still plays an important role as an information carrier. With the development of display technology, a display can be lighter, thinner, and more portable and flexible. For example, the development of electronic paper has attracted many investors' attention. As a resul...

AI Technical Summary

Benefits of technology

"The invention provides a method for manufacturing a thin film transistor (TFT) using a self-alignment mask that can be formed on the substrate surface. This mask can be used to define the position of the TFT's source, drain, and gate without the need for a separate projecting mask. The self-alignment mask is made of metal and can reflect the backlight to improve backlight efficiency. By using this method, the alignment accuracy problem can be solved, resulting in better semiconductor properties and reduced costs. The substrate structure for a TFT includes a self-alignment mask mounted on the substrate surface."

Problems solved by technology

However, the way people used to read is not easy to change; therefore paper still plays an important role as an information carrier.

However, there is not only the problem of how to improve the oxygen and water permeability of the substrate in the plastic substrate process, but also the problem of inaccurate alignment caused by the varied size of the substrate during solvent rinsing and high temperature process.

Thus, this process is difficult and causes a low yield.

These offsets may seriously affect the accuracy of the alignment and may further make the thin film transistors unstable or inconsistent if the inaccuracy problem is not solved.

Besides, because different types of plastic substrate have different extents of thermal expansion, it complicates the process and increases the cost if a different plastic substrate is applied every time and a different mask has to be provided.

Accordingly, changing the mask design and driving system becomes unnecessary.

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