Process and apparatus for organic vapor jet deposition
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[0039]Embodiments of the present invention are directed to a process of patterned deposition of organic materials onto substrates utilizing the vapor transport mechanisms of organic vapor phase deposition, and to an apparatus for performing this process of patterned deposition. In one embodiment, the process comprises: transporting organic vapors via an inert carrier gas moving at a flowrate V from a source cell, through a timed valve, and into a nozzle block, wherein the transport occurs at low pressure P; ejecting the organic vapors from the nozzle block onto a cooled substrate via the inert carrier gas moving at a flowrate V; and laterally translating the cooled substrate, which is maintained at a distance s from the ejection end of the nozzle block, at a rate v. The rate of translation is synchronized with the timed valve to create the desired patterned deposition of organic materials.
[0040]FIG. 1 shows a vacuum thermal evaporation (VTE) system 100. A source 110 is heated such t...
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