Process for preparing high-purity compact profile tungsten products
A product and high-purity technology, applied in the direction of gaseous chemical plating, metal material coating process, coating, etc., can solve the problems that thin-walled tungsten products cannot be prepared, and the structure of tungsten products is not dense.
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example 1
[0023] Example 1: Preparation of high-purity, high-density tungsten crucible by deposition
[0024] Firstly, a copper imitation body with the same shape as the prepared tungsten crucible is manufactured.
[0025] The surface of the copper imitation body was washed with acetone, dried and placed in the reaction chamber; the air in the reaction chamber was evacuated with Ar and then H 2 ; heating WF 6 Keep it in a gaseous state at about 30°C; heat the reaction chamber to 400°C, and inject H 2 and WF 6 Mixed gas; H 2 The flow rate is 5L / min, WF 6 The flow rate is 5g / min; the gas pressure in the reaction chamber is 1 atmosphere; the reaction time is 240min; 2 Cool to room temperature under protected conditions and take it out; after cutting and polishing the phantom, dissolve it with nitric acid or heat and melt the special-shaped phantom to obtain a tungsten tube. The analysis test results show that the outer diameter of the prepared tungsten tube is the same as that of the...
example 2
[0026] Example 2: Preparation of high-purity, high-density tungsten tube by deposition
[0027] First process and manufacture a copper dummy with the same outer diameter as the required tungsten tube.
[0028] The surface of the copper imitation body was washed with acetone, dried and placed in the reaction chamber; the air in the reaction chamber was evacuated with Ar and then H 2 ; heating WF 6 Keep it in a gaseous state at about 30°C; heat the reaction chamber to 550°C, and inject H 2 and WF 6 Mixed gas; H 2 The flow rate is 1.5L / min, WF 6 The flow rate is 1.5g / min; the gas pressure in the reaction chamber is 1 atmosphere; the reaction time is 90min; 2 Cool to room temperature under protected conditions and take it out; after cutting and polishing the phantom, dissolve it with nitric acid or heat and melt the special-shaped phantom to obtain a tungsten tube. The analysis and test results show that the outer diameter of the prepared tungsten tube is the same as that of...
example 3
[0029] Example 3: Preparation of high-purity, high-density tungsten tube by deposition
[0030] First process and manufacture a copper dummy with the same inner diameter as the required tungsten tube.
[0031] The surface of the copper imitation body was washed with acetone, dried and placed in the reaction chamber; the air in the reaction chamber was evacuated with Ar and then H 2 ; heating WF 6 Keep it in a gaseous state at about 30°C; heat the reaction chamber to 800°C, and inject H 2 and WF 6 Mixed gas; H 2 The flow rate is 1.0L / min, WF 6 The flow rate is 5g / min; the gas pressure in the reaction chamber is 1 atmosphere; the reaction time is 60min; 2 Cool to room temperature under protected conditions and take it out; after cutting and polishing the phantom, dissolve it with nitric acid or heat and melt the special-shaped phantom to obtain a tungsten tube. The analysis test results show that the inner diameter of the prepared tungsten tube is the same as that of the d...
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