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Preparation method and equipment of color carbon-base film

A carbon-based, thin-film technology, applied in ion implantation plating, metal material coating process, coating, etc., can solve the problems of poor film thickness and color uniformity, complicated process, harsh reaction conditions, etc., to achieve film The layer thickness and color are uniform, the process control is simple, and the effect of eliminating shadow effect

Inactive Publication Date: 2007-05-02
BEIJING POWERTECH +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Ordinary coating process usually adopts metal elements such as manganese, chromium, nickel as coating materials, such as in Chinese patent CN89101722.4, the method of vacuum coating is used to coat ordinary glass plate into brown color, but the method of vacuum coating adopts Multi-layer coating process, and each layer also needs to use different metal elements, which makes the process complicated; for workpieces with high requirements and complex shapes, the common shadow effect of physical vapor deposition will lead to poor film thickness and color uniformity, etc. problems, and the general physical vapor deposition process has problems such as easy contamination of the target material, poor process repeatability, and discoloration of the film layer
[0003] The chemical vapor deposition method using gaseous hydrocarbons as a carbon source, such as in Chinese patents 03142233.0 and 200410000752.4, improves the diffractive properties of the coating, but neither of them involves the preparation method and process of the colored film
Moreover, due to its single carbon source, the requirements for reaction conditions are relatively harsh, which limits its application range.
[0004] This series of universal problems restricts the development and production of its decoration and other vapor deposition films.

Method used

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  • Preparation method and equipment of color carbon-base film

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0021] Embodiment 1. Utilize above-mentioned reaction coating device to coat brown film on workpiece

[0022] Place the cleaned workpiece and the sputtered graphite target in the coating chamber of the reactive coating device, and evacuate to ≤6×10 -3 Pa, heat the coating chamber to T≥60°C, introduce inert gas argon into the coating chamber through a gas flow meter, and adjust and control the pressure in the coating chamber to 3×10 -1 Pa; connect the power supply of magnetron sputtering target 1, adjust the sputtering target current to be 3A, ionize argon, introduce reaction gas methane and nitrogen through the gas flowmeter at the same time, control the concentration of methane to be 15% and the concentration of nitrogen to be 30 %, the control reaction temperature is 80°C. Under these conditions, react for 20 minutes to obtain a workpiece coated with a brown film on the surface.

Embodiment 2

[0023] Embodiment 2. Utilize above-mentioned reaction coating device to plate gray thin film on workpiece

[0024] Place the cleaned workpiece and the sputtered graphite target in the coating chamber of the reaction coating device, and evacuate to ≤5×10 -3 Pa, heat the coating chamber to T≥60°C, introduce inert gas argon into the coating chamber through a gas flow meter, and adjust and control the pressure in the coating chamber to 2.6×10 -1 Pa. Turn on the power supply of the magnetron sputtering target 1, adjust the sputtering current to 5A, ionize the argon gas, and introduce the reaction gas ethylene and acetylene through the gas flow meter at the same time, control the concentration of ethylene to 20%, and the concentration of acetylene to 20%, to control the reaction The temperature was 200°C, and the reaction was carried out for 60 minutes under this condition, and a gray film was obtained on the surface of the workpiece.

Embodiment 3

[0025] Embodiment 3. Utilize above-mentioned reaction coating device to coat black thin film on workpiece

[0026] After cleaning, place the workpiece and the sputtering graphite target in the coating chamber of the reaction coating device, and evacuate to ≤3×10 -3 , heat the coating chamber to T≥150°C, introduce inert gas argon into the coating chamber through a gas flow meter, and adjust and control the pressure in the coating chamber to 2×10 -1 Pa. Turn on the power supply of the magnetron sputtering target 1, adjust the sputtering current to 10A, ionize argon, and introduce reaction gases methane and acetylene through the gas flow meter at the same time, control the concentration of methane to 30%, and the concentration of acetylene to 40%. Control the reaction temperature to 250° C., and react under this condition for 120 minutes to obtain a black film on the surface of the workpiece.

[0027] It can be seen from the above experiments that changing the ratio of the reac...

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Abstract

This invention provides a preparation of composing multicolor thin film of carbon radical, among them use gas low molecular hydrocarbons as main carbon source, sputtering graphite as assistant carbon source, Density of gas hydrocarbon is 5% to 80%. Reaction temperature of coating is controlled at 50deg.C to 300deg.C,reaction time is controlled in 5min to 150min. This invention simultaneously provides a coating equipment of reactive magnetron sputtering that carries out above-mentioned method, gas alkanes is used as main carbon source, sputtering graphite is usedas assistant carbon source.

Description

technical field [0001] The invention relates to a preparation method and equipment for a class of colored thin films, in particular to a vacuum coating method and equipment for colored carbon-based thin films. Background technique [0002] With the continuous development of science and technology, vacuum coating technology has been widely used in many fields such as mechanical processing, construction, and daily necessities. Nowadays, people's requirements for coating are getting higher and higher, especially for color coating technology. Black, gray and brown as elegant and popular colors are gradually attracting the attention of the vacuum coating industry. Ordinary coating process usually adopts metallic elements such as manganese, chromium, nickel as coating material, as in Chinese patent CN89101722.4, just adopts the method for vacuum coating to coat ordinary glass into brown color, but the method of this vacuum coating adopts Multi-layer coating process, and each laye...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/06
Inventor 刘阳
Owner BEIJING POWERTECH
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