Tunnel compensation multiple-active-region infrared detector
An infrared detector and active area technology, applied in semiconductor devices, electrical components, circuits, etc., can solve the problems of high device noise, large device dark current, narrow device absorption spectrum bandwidth, etc., and achieve low power consumption and light response. Fast, low-noise effects
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[0038] The device structure of the invention is similar to the traditional multiple quantum well device. Therefore, we can illustrate the device structure of the present invention with the aid of FIG. 1 . The device structure was epitaxially grown by MOCVD. GaAs / Ga 1-x al x As material system as an example: On GaAs semi-insulating substrate 6, epitaxial growth of high-quality n + -GaAs lower contact layer 4, then grow the basic unit (including: p + -Ga 1-x al x As, n + -GaAs and i-Ga 1-x al x As, where by p + -Ga 1-x al x As and n + -GaAs forms a PN junction, i-Ga 1-x al x The As layer forms a potential barrier, the middle n + -GaAs layer forming a potential well) 10 periods. Then grow p + - GaAs upper contact layer 2 . After the structure is grown, the mesa of the device is manufactured according to the GaAs standard photolithography and etching process, and the electrodes 1 and 5 are fabricated on the top and bottom of the mesa. Finally, it is angled, poli...
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