Method for measuring trace B/Si elements in uranium hexafluoride
A technology of uranium hexafluoride and a measurement method, which is applied in the field of mass spectrometry analysis, can solve the problems of large sample consumption, increased difficulty and high cost, and achieves the effects of reducing sample consumption, improving sampling method and strong applicability
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[0013] For different instruments, use the mixed standard configured in the experiment for one-time or periodic calibration to obtain the relative sensitivity coefficient K of boron / silicon under certain conditions 49 / K 104 .
[0014] Electron bombardment ion source, its sensitivity should be better than every 3×10 5 UF 6 Molecules collected into a UF 5 + For ions, the sampling system is equipped with a flow or pressure adjustable channel valve, and the measuring range of the measuring system should reach 10 -9 A~10 -16 A, usually realized by a Faraday cup and a secondary electron multiplier combined acceptance detection system. The ion source and sampling system are cleaned, degassed by heating and fully passivated to reduce and stabilize the background as much as possible.
[0015] ①Measurement preparation:
[0016] The instrument introduces a small amount of UF 6 Gas, find UF on Faraday cup 5 + The ion peak adjusts the instrument so that the focusing conditions a...
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