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Method and apparatus for modifying object with electrons generated from cold cathode electron emitter

A technology of electron emitter and target object, applied in the direction of electron emitter electrode/cathode, radiation/particle treatment, cold cathode, etc., can solve the problems of increasing device cost and difficulty, and achieve the improvement of cost, reduction of processing, and improvement of processing efficiency and the effect of uniformity

Inactive Publication Date: 2006-10-18
MATSUSHITA ELECTRIC WORKS LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In these methods, since an expensive electron accelerator is required to obtain a high-energy electron beam, a large increase in device cost becomes a problem
In addition, it is difficult to irradiate such a high-energy electron beam to a wide surface area of ​​the target object at a time

Method used

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  • Method and apparatus for modifying object with electrons generated from cold cathode electron emitter
  • Method and apparatus for modifying object with electrons generated from cold cathode electron emitter
  • Method and apparatus for modifying object with electrons generated from cold cathode electron emitter

Examples

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no. 1 example

[0037] Such as figure 1 As shown in FIG. 2, the device for processing and improving a target object 2 using electrons according to the present embodiment includes: a cold cathode electron emitter 1 having a planar electron emitting portion 10; a voltage applying unit 30 for applying a voltage to the An emitter to emit electrons from the planar electron emission portion; a case 20 for accommodating the emitter therein, which is made of an insulating material and has a function for providing the emitted electrons to the outside of the case and a bracket 40 for supporting the target object 2 so that the target object is exposed to the electrons provided through the opening. exist figure 1 In , reference numeral 50 represents a mesh electrode attached to the opening 21 for accelerating electrons generated from the emitter 1 . Alternatively, a window member made of a material through which electrons can pass can be attached to the opening instead of the accelerating electrode.

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no. 2 example

[0063] In this embodiment, an apparatus and method for treating and improving gas as a target object by irradiation of electrons are described.

[0064] Such as Figure 10 As shown, the treatment and improvement device of this embodiment is characterized in that it includes: a casing 20 having a gas inlet 22 for supplying the target gas into the casing, and a gas inlet 22 for supplying the treated and improvement gas to the outside and an accelerating electrode (anode electrode) 50 arranged in the housing in such a manner as to face the electron emission portion 10 of the cold cathode electron emitter 1 . This cold cathode electron emitter is the same as that used in the first embodiment. Thus, repeated description thereof is omitted. In order to avoid the influence of humidity on the electron emission efficiency of the cold cathode electron emitter, it is preferable to use dry gas with low moisture content as the gas provided into the housing 20 through the gas inlet 22 . ...

no. 3 example

[0072] In this example, an apparatus and method for irradiating electrons onto a gas or a gas containing liquid particles such as steam or moisture is described.

[0073] That is, if Figure 15 As shown, the treatment and improvement device is characterized by the use of a housing 20 comprising: a plurality of gas inlets 22 for supplying gas into the housing and formed in the lower portion of the housing side walls; and openings 21 for Electrons emitted from the cold cathode electron emitter 1 are discharged and formed on the top wall of the case at a position facing the electron emission portion 10 of the cold cathode electron emitter placed on the lower wall of the case. Furthermore, the device has an accelerating electrode 50 arranged above the opening and a gas flow channel 70 provided on the top wall of the housing 20 . In this case, gas is supplied from the gas supply unit 72 to the gas flow channel 70 as the target object, as Figure 15 , then processed and improved b...

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Abstract

The present invention provides an apparatus and method for treating and improving a target object using electrons, by which it is possible to use electrons to uniformly And effectively deal with and improve the target audience. The method uses a cold-cathode electron emitter having the ability to emit electrons from a planar electron-emitting portion according to the tunneling effect, and preferably includes a pair of electrodes and a strong field drift layer comprising nanocrystalline silicon disposed between the electrodes . A target object is exposed to electrons emitted from the planar electron emitting portion by applying a voltage between the electrodes. Preferably, the energy of the emitted electrons is selected from the range of 1 eV to 50 keV, preferably 1 eV to 100 eV.

Description

technical field [0001] The present invention relates to methods and apparatus for manipulating and improving target objects using electronics. Background technique [0002] In the past, electron radiation has been used to surface modify, disinfect or clean target objects. For example, Japanese Patent Laid-Open Publication [kokai] No. 2002-6094 discloses an electron radiation device that can be used to form a bridge structure or to purify exhaust gas. The apparatus is provided with an electron gun having a heating wire, a high voltage power supply for supplying current to the heating wire to generate electrons, an accelerating electrode for accelerating the generated electrons to obtain an electron beam, and an electromagnet for deflecting the electron beam . [0003] However, since the filament is an electron source with point-like or linear electron-emitting portions, scanning electron beams is required to treat and improve a relatively wide surface area of ​​a target obj...

Claims

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Application Information

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IPC IPC(8): G21K5/00G21K5/04A61L2/08B01J19/08G21K1/00H01J19/24
Inventor 相泽浩一栎原勉菰田卓哉池田顺治马场彻
Owner MATSUSHITA ELECTRIC WORKS LTD
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