Ion source apparatus and method
An ion source, plasma technology, applied in the field of cyclotron design, can solve the problems of performance degradation, strict manufacturing tolerance, short life of ion source pipeline 200, etc.
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[0018] Typical embodiments of the present invention will be described in detail below.
[0019] see Figure 8 , shows a perspective view of a typical ion source conduit 300 according to one embodiment of the present invention. Ion source tubing 300 can be used for similar figure 1 The ion source shown is that of a plasma-based ion source. A plasma discharge (not shown) may be maintained in or near ion source conduit 300 . Ion source tubing 300 may be made of heat and plasma discharge resistant metals such as copper and tungsten. As shown, a typical ion source conduit 300 generally has a cylindrical shape. In the front side of the ion source conduit 300 there may be a slit opening 310 for extracting ions. There may be end openings 314 in the ends of the ion source conduit 300 to accommodate the flow of gas components and help define the shape and location of the plasma discharge. Inside the ion source conduit 300, there may be a pre-shaped cavity 312 that further defines ...
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