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Quasi molecular lamp device

A technology for excimer lamps and lampshades, which is applied in the direction of discharge lamps, gas discharge lamps, parts of gas discharge lamps, etc., can solve problems such as damage and deterioration, and achieve increased irradiation area, low cost, and simplified device structure Effect

Active Publication Date: 2006-06-07
USHIO DENKI KK
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to this phenomenon, oxidation of power supply parts is promoted, and deterioration and damage are carried out.

Method used

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  • Quasi molecular lamp device
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  • Quasi molecular lamp device

Examples

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Embodiment Construction

[0040] figure 1 It shows the excimer lamp device of the present invention, and enlarges the sectional view showing the end of the lamp; figure 2The figure is an A-A' sectional view. The excimer lamp device 1 includes: a rectangular parallelepiped box-shaped lampshade 10 as a whole, and an excimer lamp 20 disposed adjacent to the inner space P of the processing chamber; The processing chamber 40 is equipped with a conveyance mechanism not shown, such as a conveyor, and carries in and out the workpiece|work W, such as a glass substrate. In addition, an exhaust duct 42 is provided at the lower portion of the processing chamber 40 for discharging oxides and the like generated during processing the workpiece W to the outside, and at the upper portion of the processing chamber 40 is provided a gas supply port 43 capable of supplying gas to the processing chamber. .

[0041] An opening is provided on the lower surface of the lampshade 10, and the inner space H of the lampshade 1...

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Abstract

The present invention provides an excimer lamp device, which simplifies the structure of the device by removing the light output window that divides the lampshade and the irradiated area, can realize cost reduction, and prevents the power supply components arranged near the end of the lamp from being exposed to active oxygen to prevent Oxidation, and can reduce the occurrence of deterioration and breakage of the part. An excimer lamp device is provided with an excimer lamp that emits ultraviolet light through the discharge of a dielectric, and a lampshade that accommodates the excimer lamp; an opening for taking out radiated light from the lamp is formed on the lampshade, through which the lampshade The internal space communicates with the internal space of the processing chamber for processing the object to be processed; it is characterized in that a power supply component is connected to at least one end of the above-mentioned excimer lamp to form a power supply joint; inside the lampshade, a partition is provided to form a power supply Part of the separation between the lamp end area of ​​the junction and the interior space of the lampshade.

Description

technical field [0001] The present invention relates to an excimer lamp device including an excimer lamp that emits ultraviolet light by discharge of a dielectric, and a lamp cover that accommodates the excimer lamp. Background technique [0002] For example, in an excimer lamp device equipped with an excimer lamp known from Patent Document 1, etc., ultraviolet light of 200 nm or less radiated from the excimer lamp is irradiated to the surface of the object to be treated, and the generated ozone and the transmitted ultraviolet light The synergistic effect of light decomposes organic matter splashed on the surface of the object to be treated for cleaning. [0003] Figure 8 A schematic configuration diagram of the excimer lamp device is shown, in which an excimer lamp 91 is arranged inside a lamp cover 90 , and a light output window M having an opening for ultraviolet light is provided in a hermetically sealed manner on the lower surface of the lamp cover 90 . A treatment ch...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J65/00
CPCA61L9/015A61L2209/212A61L2209/12H01J65/046H01J61/025H01J61/24H01J61/28
Inventor 广濑贤一
Owner USHIO DENKI KK
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