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Soft x-ray transmission type multilayer film wide-band phase shift sheet and its preparing method

A multi-layer, transmissive technology, used in optical radiation measurement, measuring devices, instruments, etc., can solve problems such as single wavelength, small use range of phase shifters, and inability to meet experimental requirements.

Inactive Publication Date: 2005-03-02
TONGJI UNIV
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  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At 13.9nm wavelength, T s and T p are approximately equal, and Δφ reaches 90 degrees, but at other wavelengths, the difference between Ts and Tp is large, and the phase shift is also very different from 90 degrees. Although the optimized design of the quarter phase shifter designed by this method is relatively simple, Periodic multilayer films are relatively easy to prepare, but the designed phase shifter has a small application range, can only meet a single wavelength, and sometimes cannot meet the experimental requirements

Method used

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  • Soft x-ray transmission type multilayer film wide-band phase shift sheet and its preparing method
  • Soft x-ray transmission type multilayer film wide-band phase shift sheet and its preparing method
  • Soft x-ray transmission type multilayer film wide-band phase shift sheet and its preparing method

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Embodiment Construction

[0030] Below in conjunction with accompanying drawing, the present invention will be further described, figure 1 It is a schematic diagram of a single-wavelength transmissive quarter phase shifter in the prior art, with a normal incidence angle of 42.7 degrees, a period of 30, a Mo film thickness of 3.47nm, a Si film thickness of 5.82nm, and a roughness of 0nm. The change curve of the transmittance Ts, Tp and phase difference Δφ of the multilayer film with the wavelength of the incident light, at the wavelength of 13.9nm, the transmittance Ts and Tp reach 24% at the same time, and the phase difference is 90 degrees; figure 2 It is the theoretical design result diagram of single-wavelength transmissive quarter phase shift plate in the prior art, when the positive incident angle is 50 degrees, the period is 20, the Mo film thickness is 5.4nm, the Si film thickness is 5.4nm, and the roughness is 0nm, Mo / Si multilayer film transmittance Ts, Tp and phase difference Δφ change curve...

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Abstract

The invention provides a design of soft X-ray wave-band high-phase difference, high-optical flux, wide-wave band phase shifting piece that adopts multilayer film structure, not only having higher optical flux and polarization degree as well as wider bandwidth but also having simple manufacturing process, and as used, convenient to regulate. The invention introduces the design of the phase shifting piece and a concrete preparing method, as well as the calculated optical performance of the wide-band phase shifting piece, etc. It can be applied to many polarization measuring fields such as soft X-ray magnetic circular dichroism (MCD) and magnetic linear dichroism (MLD) analysis, soft X-ray resonance magnetic dispersion, etc.

Description

technical field [0001] The invention relates to a multilayer film polarization optical element in the soft X-ray band, especially a soft X-ray transmission type multilayer film broadband phase shifter, which can realize the conversion between linearly polarized light and circularly polarized light, and can be used for soft X-ray X-ray magnetic circular dichroism, magnetic line dichroism analysis, and soft X-ray resonance magnetic scattering and many other fields of polarization measurement. Background technique [0002] Soft X-ray band polarizing optical components include polarizers, analyzers and phase shifters. In many polarization measurement experiments such as soft X-ray magnetic circular dichroism, magnetic line dichroism, and soft X-ray resonant magnetic scattering, it is necessary When realizing the conversion between linearly polarized light and circularly polarized light, a phase shifter is needed at this time. To convert linearly polarized light into circularly ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J4/00G02B5/30
Inventor 王占山王洪昌
Owner TONGJI UNIV
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