Flexible X-ray reflection type multipayer film broad band poarizer and its preparation method

Abstract

Comparing with prior art, the disclosed wide band polarizer possesses advantages of higher luminous flux, degree of polarization, wider band, simple technique of preparation and easy of adjustment. The invention discloses designing thoughts for polarizer and concrete preparation method as well as optical property of the polarizer calculated under the designing thoughts. The invention is applicable to many polarization measurement areas such as soft X ray magnetic circular or linear dichromatic analysis and soft X ray resonance magnetic scattering.

Description

technical field [0001] The invention relates to a soft X-ray band multilayer film polarization optical element, specifically a soft X-ray reflective multilayer film broadband polarizer, which can be used for soft X-ray magnetic circular dichroism, magnetic line dichroism analysis, and soft X-ray Ray resonance magnetic scattering and many other fields of polarization measurement. Background technique [0002] The soft X-ray band polarizer is a polarizer under the incident condition of the quasi-Brewster angle (due to the absorption of the material, there is no Brewster angle at which the reflectivity of P-polarized light is equal to 0). Figure 1 is a fixed wavelength , Mo / Si multilayer films with slightly different periods R s , R p and R s / R p With the change of incident angle, d=10.1nm multilayer film ( Figure 1a ) exactly matches the quasi-Brewster angle, R s and R s / R p All reach larger values, d=10.5nm multilayer film ( Figure 1b ) does not match the quasi-Br...

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Problems solved by technology

[0006] Adjustable angle double multi-layer film polarizer, the use of multi-layer film polarizer has a higher degree of polarization when different wave bands correspond to different angles, using two identical polarizers placed in parallel, while ensuring the direction of the outgoing beam not deflected, as Figure 3a As shown, but in the working process of this type of polarizer, the two polarizers must be rotated precisely corresponding to different wavelength bands at the same time, and kept parallel to each other, which is inconvenient to adjust, and the final luminous flux is also relative to the gradient multilayer film. reduce, Figure 3b , 3c Shown is a Mo / Si multilayer film with a period of 50, a period thickness of 11.00nm, and a top film thickness ratio of 0.320, corresponding to the polarization component R of the multilayer film at different angles s and R p The relationship between reflectivity and incident light wavelength

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