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Baking method for ceramic plate and producing method

A technology of ceramic plates and ceramics, applied in the firing field of piezoelectric ceramic plates, can solve problems such as damage, poor shape, unsuitable sintered body, etc., and achieve the effect of preventing warping or bending

Inactive Publication Date: 2004-09-29
TDK CORPARATION
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In this way, in the case where firing is performed with the mounting positioner in constant contact with the ceramic plate, defects such as sintered body obtained by firing the ceramic plate are sintered on the mounting positioner, etc. It is not suitable for sintered bodies of piezoelectric ceramic products because it may break or cause shape defects when it is peeled off from the positioner.

Method used

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  • Baking method for ceramic plate and producing method
  • Baking method for ceramic plate and producing method
  • Baking method for ceramic plate and producing method

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Experimental program
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Effect test

Embodiment approach 1

[0070] First, refer to Figure 1-Figure 3 Embodiment 1 of the present invention will be described.

[0071] Such as figure 1 with figure 2 As shown, a ceramic plate 2 is mounted on a dense (porosity of 3% or less, more preferably a porosity of 1% or less) zirconia mounting positioner (first holding member) 1 formed in a square shape of 100 mm×100 mm. . Since the zirconia mounting positioner 1 has low reactivity with the ceramic plate 2 during firing and has good durability, it is preferably completely stabilized with 8 mol% to 12 mol% of yttrium oxide (Y2O3). In addition, the ceramic plate 2 is made of piezoelectric ceramics containing lead zirconate titanate (specifically, PbTiO 3 -PbZrO 3 -Pb(Mg1 / 3Nb2 / 3)O 3 -Pb(Zn1 / 3Nb2 / 3)O 3 A single plate made of 4 components such as piezoelectric ceramics) was produced as follows.

[0072] That is, materials in the form of oxides or carbonates are wet-mixed by a ball mill, and intermediate firing is carried out at 950 degrees aft...

Embodiment approach 2

[0084] Refer below Figure 2-Figure 5 Embodiment 2 of the present invention will be described.

[0085] In the method of firing a ceramic plate according to Embodiment 2, a laminate of ceramic sheets in which electrodes are patterned is used as the ceramic plate 2 . Ten ceramic plates 2 were taken out by press-cutting from the press-treated green sheet laminate (ceramic raw material), and formed into a rectangular thin plate shape [33 mm×12 mm, thickness 0.375 mm]. In addition, the ceramic plate 2 is subjected to polarization treatment or the like after firing as described below, and becomes a multilayer piezoelectric element.

[0086] Such as Figure 4 with Figure 5 As shown, ten ceramic plates 2 cut out from the laminated body of green sheets were loaded on a zirconia mounting setter 1 and arranged in a matrix of 2 rows and 5 columns at the center of the zirconia mounting setter 1 . In addition, four rod-shaped enclosing members 4 are mounted on the zirconia mounting po...

Embodiment approach 3

[0095] Embodiment 3 of the present invention will be described with reference to FIGS. 7 to 11 from the front.

[0096] First, as shown in FIG. 7( a ), a ceramic plate 12 is placed in the approximate center of a square plate-shaped mounting positioner 10 . The placement positioner 10 is made of yttrium oxide (Y) that has added 8mol%-12mol% 2 o 3 ) of fully stabilized zirconia. The mounting positioner 10 is dense, and its porosity is less than 3%, but the porosity is preferably less than 1%. The ceramic plate 12 is made of piezoelectric ceramics containing lead zirconate titanate (specifically, PbTiO 3 , PbZrO 3 , Pb(Mg 1 / 3 Nb 2 / 3 )O 3 , and Pb(Zn 1 / 3 Nb 2 / 3 )O 3 A rectangular thin-plate-shaped veneer formed of four components such as piezoelectric ceramics) is produced by the same method as that described in Embodiment 1.

[0097]Next, as shown in FIG. 7( b ), the pillar members 14 are mounted on the four corners of the mounting positioner 10 . The pillar member is...

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Abstract

To provide a method of firing a ceramic plate by which the occurrence of the warpage or waviness of the ceramic plate after firing can be prevented.The ceramic plate 2 is arranged on a zirconia setter 1 between opposed zirconia setters 1 and 5. The periphery part of the ceramic plate 2 is surrounded by a surrounding member 4 composed of a ceramic material having the sane composition as the ceramic plate 2 and the ceramic plate 2 is fired. As a result, lead in lead titanozirconate is released into a gap S between the ceramic plate 2 and the zirconia setter 5 from each surrounding member 4. The evaporation of lead in the lead titanozirconate from the ceramic plate 2 is suppressed and the concentration of lead in the gap S is kept uniform during the firing. Then, the occurrence of the warpage or the waviness of the ceramic plate 2 after firing can be prevented. (C)2005,JPO&NCIPI.

Description

technical field [0001] The present invention relates to a firing method and a manufacturing method of a ceramic plate, and more particularly to a firing method and a manufacturing method of a piezoelectric ceramic plate used for a laminated piezoelectric substrate such as a piezoelectric actuator or a piezoelectric sensor. Background technique [0002] Conventionally, piezoelectric ceramics containing lead titanate and lead zirconate titanate as main components are known as lead-containing ceramics. In addition, the piezoelectric ceramics are used in various products such as ceramic vibrators, ceramic filters, piezoelectric buzzers, piezoelectric sensors, and piezoelectric actuators. Among piezoelectric ceramics used in these products, there are substrates (piezoelectric ceramic plates) made of piezoelectric materials, or laminates in which the substrate and internal electrode layers are alternately laminated, which has been actively studied in recent years. [0003] Here, ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/64
Inventor 佐佐木诚志
Owner TDK CORPARATION
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