Detection device and method for oscillating attitude of planar mirrow
A detection method and plane mirror technology, applied in the direction of measuring devices, using optical devices, using electric/magnetic devices to transmit sensing components, etc., can solve the problems of complex mechanical structure, bulky, unstable and other problems of the instrument, and achieve the elimination of DC signal drift , The measurement principle is simple and the measurement device is compact
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[0026] The measurement principle, structure and best implementation mode of the present invention will be further described below in conjunction with the accompanying drawings.
[0027] figure 1 It is a schematic diagram of the measurement principle of the present invention, when the plane mirror 7 has an angular deflection θ, the laser beam irradiated on the plane mirror, when reflected by the plane mirror and focused on the four-quadrant photodetector 6, there will be an offset S, the offset S has the following relationship with the angular deflection θ of the plane mirror:
[0028] θ = 1 2 arctg ( s / f ′ ) ≈ s / 2 f ′ . . . . ( 1 ) ...
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