Protective coating for optical module and preparation method thereof
A protective coating and optical module technology, applied in coatings, anti-corrosion coatings, metal material coating processes, etc., to achieve the effects of strong controllability, air tightness, and high selectivity
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Embodiment 1
[0031]Plasma-enhanced chemical vapor deposition technology is used to sequentially form SiMO on the surface of optical components composed of PCBA, PEI Lens, etc. x Gas barrier, chemical barrier and water vapor barrier, forming a "sandwich" protective film consisting of three layers; SiMO x The thicknesses of the gas barrier layer, chemical barrier layer and water vapor barrier layer were 1 micron, 100 microns and 8 microns, respectively. The specific preparation method is as follows: put the optical component to be coated (the part that shields the gold finger) into the coating chamber, the chamber temperature is 25°C, and the door of the coating chamber is closed; the raw material bottle 1 is filled with ethyl orthosilicate, isopropyl alcohol Aluminum (molar ratio is 5:1), raw material bottle 2 is filled with TCM203, UVR6110 (molar ratio is 1:1), raw material bottle 3 is filled with 2,3,5,6-tetrafluoro-p-xylene dimer; set Coating parameters, the coating pressure is 0.01 atm...
Embodiment 2
[0033] Plasma-enhanced chemical vapor deposition technology is used to sequentially form SiMO on the surface of optical components composed of PCBA, PEI Lens, etc. x Gas barrier, chemical barrier and water vapor barrier, forming a "sandwich" protective film consisting of three layers; SiMO x The thicknesses of the gas barrier layer, chemical barrier layer and water vapor barrier layer were 2 microns, 200 microns and 10 microns, respectively. The specific preparation method is as follows: put the optical component to be coated (the part that shields the gold finger) into the coating chamber, the chamber temperature is 25°C, and the door of the coating chamber is closed; Ethyl ester and tetraethyl zirconate (molar ratio is 5:1:1), raw material bottle 2 is filled with TCM101, UVR6128 (molar ratio is 2:1), and raw material bottle 3 is filled with p-xylene dimer; set the coating Parameters, the coating pressure is 0.02 atmosphere; the feeding port is inserted into the raw material...
Embodiment 3
[0035] Plasma-enhanced chemical vapor deposition technology is used to sequentially form SiMO on the surface of optical components composed of PCBA, PEI Lens, etc. x Gas barrier, chemical barrier and water vapor barrier, forming a "sandwich" protective film consisting of three layers; SiMO x The thicknesses of the gas barrier layer, chemical barrier layer and water vapor barrier layer were 1 micron, 150 microns and 8 microns, respectively. The specific preparation method is as follows: put the optical component to be coated (shielding the gold finger part) into the coating chamber, the chamber temperature is 25°C, and the door of the coating chamber is closed; Ethyl ester (mol ratio is 5:1), raw material bottle 2 is equipped with TCM207, UVR6110 (molar ratio is 5:1), and raw material bottle 3 is equipped with p-xylene dimer; set the coating parameters, and the coating pressure is 0.01 atmosphere; Insert the feeding port into the raw material bottle 1, open the equipment, star...
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