OPC correction method
An extension direction, isolated line technology, applied in the field of optical proximity effect correction, can solve the problems such as pitchloose can not be completely solved, poor process window in the middle area, easy disconnection and other problems, to avoid adverse effects, prevent easy disconnection, and improve process window. Effect
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[0039] Such as figure 2 Shown is the flow chart of the OPC correction method of the embodiment of the present invention; as Figure 3A to Figure 3DAs shown, it is a schematic diagram of graphics aligned with various semi-isolated line ends 202 in the original layout of the OPC correction method according to the embodiment of the present invention; Figure 4A to Figure 4C As shown, it is a schematic diagram of the graph when pre-adjusting various semi-isolated line ends 202 by using the elongation method in the OPC correction method of the embodiment of the present invention; Figure 5A to Figure 5C Shown is a schematic diagram of the OPC correction method of the embodiment of the present invention when various semi-isolated line ends 202 are pre-adjusted by using a shortening method; the OPC correction method of the embodiment of the present invention includes the following steps:
[0040] Step 1, such as Figure 3A to Figure 3D As shown, it is a schematic diagram of graphi...
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