Chemical adsorption instrument with function of removing residual gas in pipeline by vacuumizing
A residual gas and chemical adsorption technology, which is applied in the preparation of scientific instruments, instruments, and test samples, can solve problems such as pollution, slow diffusion, and impact on test accuracy, and achieve improved activation efficiency and high cleanliness Effect
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[0019] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0020] A chemical adsorption instrument with the function of vacuuming to remove residual gas in pipelines, comprising: a first gas source 1, a second gas source 2, a first stop valve 3, a second stop valve 4, a gas flow controller 5, and a pressure sensor 6. U-shaped sample tube 7, heating furnace 8, detector 9, two-position three-way valve 10, exhaust pipe 11, and vacuum pump 12.
[0021] The first gas source 1 is connected to the inlet of the fi...
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