Flat lens capable of customizing aberration based on phase change material and manufacturing method thereof

Abstract

The invention relates to a flat plate lens capable of customizing aberration based on a phase-change material and a manufacturing method of the flat plate lens. Comprising a medium substrate which can transmit a light beam of a target wave band; the phase-change dielectric films are arranged on the upper surface and the lower surface of the dielectric substrate respectively, and phase-change materials contained in the phase-change dielectric films can present different states corresponding to different phase states of the flat lens under the action of external excitation signals; the cladding film is arranged on the surface of the phase change medium film, the cladding film performs low absorption on a target wave band and a reconstruction wave band, and the reconstruction wave band is a femtosecond laser beam wave band which reconstructs phase distribution on the surface of the flat lens; wherein the two layers of phase change dielectric films can work independently, and the aberration of the flat lens can be customized by setting the phase distribution of the two layers of phase change dielectric films and the thickness of the dielectric substrate. The flat plate lens provided by the invention has the properties of reconfigurability, aberration customizing and non-volatility, and is a transmission type element.

Description

technical field [0001] The invention belongs to the technical field of microelectronics, and more specifically relates to a flat plate lens with customizable aberration based on phase change materials and a manufacturing method thereof. Background technique [0002] Metasurface lens is to use electron beam exposure, focused ion beam technology or nanoimprinting to process sub-wavelength dielectric microstructures on the substrate film. Once these microstructures are processed, they are fixed and cannot be modified. The corresponding device The nature of is also fixed, so it is not reconfigurable. [0003] Although the spatial light field modulation technology based on liquid crystal materials can realize surface structure reconstruction by changing the electric field applied to each pixel, it requires continuous application of the electric field and does not have non-volatile properties; and due to the limitation of electrode materials, this method is mostly Reflective elem...

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Problems solved by technology

[0002] Metasurface lens is to use electron beam exposure, focused ion beam technology or nanoimprinting to process sub-wavelength dielectric microstructures on the substrate film. Once these microstructures are processed, they are fixed and cannot be modified. The corresponding device The nature of is also fixed, so it is not reconfigurable

[0003] Although the spatial light field modulation technology based on liquid crystal materials can realize surface structure reconstruction by changing the electric field applied to each pixel, it requires continuous application of the electric field and does not have non-volatile properties; and due to the limitation of electrode materials, this method is mostly Reflective components cannot meet the needs of transmissive flat lenses, and cannot realize integrated lens groups

[0004] The reflective dynamic metasurface based on phase change material realizes reconfigurable and non-volatile spatial light field regulation, but the microstructure of the surface medium cannot be changed during the reconstruction process, and only the phase change of the phase change material is changed. state, the single-layer structure cannot achieve complete period phase regulation, and is currently mainly used for reflective spatial light field regulation, which cannot meet the needs of flat lens transmission optical elements

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