Multi-channel field effect transistor nano biosensor and preparation method and application thereof
A field effect transistor and biosensor technology, applied in the field of analysis and detection, can solve the problems of difficult to reflect the complexity of tumors, false negatives, easy to appear false positives, etc., to achieve excellent electrical performance, simplify detection steps, and improve detection throughput. Effect
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[0046] Construction of a multi-channel IGZO FET sensor:
[0047] S1 preparation of gold electrodes:
[0048] S1.1 Use CAD software to design an electrode pattern consisting of 5 sources, 1 drain, and 1 gate, and process it into a corresponding mask for subsequent photolithography operations.
[0049] S1.2 Select a p-type silicon wafer with a 300nm silicon oxide layer as the substrate, uniformly spin-coat a layer of positive photoresist AZ521 on its surface, and then place the silicon wafer with the spin-coated photoresist on a heating plate at 115°C Heat for 4 minutes to solidify the photoresist. Then, the pattern on the mask plate is exposed with the help of an ultraviolet lithography machine, and the electrode pattern is transferred to the spin-coated photoresist, and developed with ZX-238 developer to expose the position of the electrode.
[0050] S1.3 A 15nm Cr layer and a 50nm Au layer are uniformly deposited on the surface of the silicon wafer in S1 using a thermal eva...
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