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High-binding-force optical thin film of diamond crystal and preparation method of high-binding-force optical thin film

An optical thin film and diamond technology, which is applied in metal material coating process, ion implantation plating, coating, etc., can solve the problems of diamond coating technology such as difficulty, low damage resistance, film instability, etc., to improve the film system Surface binding force, improve coating effect, improve stability effect

Pending Publication Date: 2022-04-12
TECHNICAL INST OF PHYSICS & CHEMISTRY - CHINESE ACAD OF SCI +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The invention provides a high-binding force optical film of diamond crystal and its preparation method, in order to solve the technical problems that the existing diamond crystal coating technology is difficult, the film system is unstable, the anti-damage ability is low, and it is easy to fall off
[0007] The invention provides a high-binding force optical film of diamond crystals and a preparation method thereof, so as to solve the problems that the existing diamond coating technology is difficult, the film system is unstable, the anti-damage ability is low, and it is easy to fall off

Method used

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  • High-binding-force optical thin film of diamond crystal and preparation method of high-binding-force optical thin film
  • High-binding-force optical thin film of diamond crystal and preparation method of high-binding-force optical thin film
  • High-binding-force optical thin film of diamond crystal and preparation method of high-binding-force optical thin film

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preparation example Construction

[0029] On the one hand, the present invention provides a kind of preparation method of the high cohesive force optical film of diamond crystal, please refer to figure 1 as shown, figure 1 It is a flow chart of a method for preparing a diamond crystal high-binding force optical film provided in an embodiment of the present invention. The preparation method includes the following steps:

[0030] Step 100, placing the diamond crystal in a vacuum chamber, and making the diamond surface reach a preset temperature, and the preset temperature is 200°C-1000°C.

[0031] In step 200, a silicon layer is spread on the surface of the diamond crystal to form a film structure, and in the film structure, a silicon carbide layer is formed at the interface between the silicon layer and the diamond crystal.

[0032] Step 300, coating a target film layer on the surface of the film structure to form a diamond crystal-based film structure.

[0033] In this step 300 , specifically, the step of pla...

Embodiment 1

[0046] In the present embodiment, the preparation method of the high bonding force optical film of diamond crystal comprises the following steps:

[0047] Place the diamond crystal 21 in the vacuum chamber 11 of the coating device and fix it on the stage 12. The working temperature is controlled by the pre-laying temperature controller 12 to 200°C, and the pre-laying silicon layer value of the thickness controller 15 is set. The thickness is 0.1nm, and the required silicon material is provided by the film tray 13, and a silicon layer is laid on the surface of the diamond crystal 21 by ion beam sputtering technology to form a film structure. During this process, the thickness controller 15 detects the thickness of the tiled silicon layer and feeds it back to the thickness controller 15. When the thickness of the tiled silicon layer reaches 0.1 nm, the laying of the silicon layer is stopped. During this process, the silicon carbide layer 23 is formed at the contact interface bet...

Embodiment 2

[0050] In the present embodiment, the preparation method of the high bonding force optical film of diamond crystal comprises the following steps:

[0051] Place the diamond crystal 21 in the vacuum chamber 11 of the coating device and fix it on the stage 12. The working temperature is controlled by the pre-laying temperature controller 12 to 700°C, and the pre-laying silicon layer value of the thickness controller 15 is set. The thickness is 3nm, and the required silicon material is provided by the film tray 13, and three layers of silicon are laid on the surface of the diamond crystal 21 by electron beam evaporation technology to form a film structure. During this process, the thickness of the tiled silicon layer is detected by the thickness controller 15 and fed back to the thickness controller 15. When the thickness of the tiled silicon layer is 3 nm, the laying of the silicon layer is stopped. During this process, a silicon carbide layer 23 is formed at the interface where...

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Abstract

The invention provides a high-binding-force optical thin film of a diamond crystal and a preparation method of the high-binding-force optical thin film of the diamond crystal, and the preparation method of the high-binding-force optical thin film of the diamond crystal comprises the steps that the diamond crystal is placed in a vacuum chamber, the surface of the diamond crystal reaches a preset temperature, and the preset temperature ranges from 200 DEG C to 1000 DEG C; paving a silicon layer on the surface of the diamond crystal to form a film system structure, and forming a silicon carbide layer at the contact interface of the silicon layer and the diamond crystal in the film system structure; and plating a target film layer on the surface of the film system structure to form the diamond crystal high-binding-force optical thin film. According to the high-binding-force optical thin film of the diamond crystal and the preparation method of the high-binding-force optical thin film, the binding force of a film system can be changed into chemical bond binding force from Van der Waals force, the surface binding force of the film system is improved, the stability and damage resistance of the film system are improved, and the problem that the film system is prone to falling off is solved.

Description

[0001] The invention relates to the technical field of coating, in particular to a diamond crystal high-binding force optical film and a preparation method thereof. Background technique [0002] Raman laser technology has the characteristics of beam quality optimization effect, pulse compression effect, narrow linewidth output, etc., and is an important technology to realize laser wavelength expansion. Diamond crystal has the advantages of wide light transmission range, high thermal conductivity, and large Raman frequency shift coefficient, and it is an important research direction of Raman laser technology in recent years. [0003] The diamond crystal structure is stable and has no dangling bonds, which makes the existing coating technology difficult. The film system is unstable, has low damage resistance, and is easy to fall off. This is one of the important technical problems to be solved by diamond Raman laser technology. Contents of the invention [0004] (1) Technical ...

Claims

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Application Information

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IPC IPC(8): C23C14/02
Inventor 薄勇申玉袁磊徐健彭钦军江南易剑袁其龙
Owner TECHNICAL INST OF PHYSICS & CHEMISTRY - CHINESE ACAD OF SCI
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