Spin coating method suitable for Micro OLED and Micro OLED structure

Abstract

The invention provides a spin coating method suitable for a Micro OLED, which is applied to the technical field of Micro OLEDs, and also relates to a Micro OLED structure. The spin coating method suitable for the Micro OLED comprises the following steps: preparing a hydrophilic material layer (3) on a transition substrate (4), the hydrophilic material layer (3) being made of one of ethylene oxide, polyimide and polymethyl methacrylate; transferring the hydrophilic material layer (2) to a concave position (5) of a substrate (1); preparing a hydrophobic material layer (7) on the transition substrate (4), the hydrophobic material layer (7) being made of one of fluorinated polyethylene, polyolefin and polycarbonate; and transferring the hydrophilic material layer (2) to a convex position (8) of the substrate (1). According to the spin coating method suitable for the Micro OLED and the Micro OLED structure, the hydrophilic and hydrophobic properties of organic liquid drops are used in a matched mode, different hydrophilic and hydrophobic structures are arranged respectively, the retention capacity of the concave and convex parts on the organic liquid drops is changed, and the problem of uneven spin coating is solved.

Description

technical field [0001] The invention belongs to the field of Micro OLED technology, and more specifically relates to a spin coating method suitable for Micro OLED, and the invention also relates to a Micro OLED structure. Background technique [0002] In the fields of semiconductor, panel display and other micro-nano processing, the preparation of the organic layer is usually by coating. For square or large-scale coating, the method of slot coating is usually used, which usually produces a thicker organic glue; for round or small-sized coating, the method of spin coating is usually used, which can achieve a larger Preparation of thin organogel thicknesses. In addition, there are still inkjet printing and spraying methods to prepare organic adhesives. In the field of micro-display Micro OLED, since the shape of the substrate is circular, the diameter is 200mm, 300mm, etc., and the thickness of the organic layer is required to be precise and thin, it is inevitable to use the...

AI Technical Summary

Problems solved by technology

In the spin coating process, if the bottom substrate surface is flat, better film thickness uniformity can be obtained; but if the bottom layer is uneven, unevenness will inevitably occur, which will seriously affect product performance

Although it can be alleviated to a certain extent by changing the process, such as stepwise adjustment of the speed and stepwise change of the dispensing position, it still cannot completely solve the problem.

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