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Room-temperature platinum telluride array terahertz detector and production method thereof

A terahertz detector, platinum telluride technology, applied in the field of terahertz detectors, can solve the problems of limited, single component of terahertz detectors, no large area, controllable thickness, etc. The effect of high-sensitivity detection

Active Publication Date: 2021-12-21
SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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Problems solved by technology

[0005] Currently based on PtTe 2 The research on the terahertz detectors is a single component, and the large-area and thickness-controllable PtTe has not been realized. 2 The preparation of materials, as well as the preparation of its terahertz array devices, make it limited in practical applications

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  • Room-temperature platinum telluride array terahertz detector and production method thereof
  • Room-temperature platinum telluride array terahertz detector and production method thereof
  • Room-temperature platinum telluride array terahertz detector and production method thereof

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preparation example Construction

[0045] ginseng figure 2 As shown, the present invention also discloses a method for preparing a room temperature platinum telluride array terahertz detector, including:

[0046] S1. Provide substrate;

[0047] S2, preparing an oxide layer on the substrate by a thermal oxidation method;

[0048] S3, preparing a platinum telluride channel layer distributed in an array on the oxide layer;

[0049] S4, preparing an array-distributed electrode layer on the oxide layer and part of the platinum telluride channel layer.

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Abstract

The invention discloses a room-temperature platinum telluride array terahertz detector and a production method thereof. The detector comprises a substrate, an oxide layer located on the substrate, platinum telluride channel layers which are located on the oxide layer and are distributed in an array, and electrode layers which are located on the oxide layer and a part of the platinum telluride channel layers and are distributed in an array. The terahertz detector realizes effective detection of terahertz waves based on the II-type Dirac semimetal characteristic of platinum telluride. According to the terahertz detector, the excellent physical property of platinum telluride is utilized, and high-speed and high-sensitivity detection of terahertz waves at the room temperature can be achieved.

Description

technical field [0001] The invention belongs to the technical field of terahertz detectors, in particular to a room-temperature platinum telluride array terahertz detector and a preparation method thereof. Background technique [0002] Terahertz (THz) radiation usually refers to electromagnetic waves with a wavelength of 30µm to 3mm (0.1 THz to 10 THz), between millimeter waves and infrared waves. the transition area. The high transmittance, low energy, fingerprint characteristics and high frequency and high bandwidth characteristics of terahertz waves make it useful in the fields of non-destructive testing, safety testing, medical imaging, near-field microscopy, space imaging, environmental testing, and information communication. important application. [0003] For the application of terahertz technology, the core device is a high-performance solid-state terahertz detector at room temperature. In 1993, Dyakonov and Shur theoretically predicted that high electron mobility...

Claims

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Application Information

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IPC IPC(8): H01L31/032H01L31/0224H01L31/113H01L31/18G01J1/42
CPCH01L31/032H01L31/022408H01L31/113H01L31/18G01J1/42Y02P70/50
Inventor 张凯董卓于文治
Owner SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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