A method of mixing rare earth materials in the growth of two -dimensional materials CVD
A technology of rare earth materials and two-dimensional materials, applied in the field of two-dimensional materials, can solve the problems of long photoelectric response time, low quantum efficiency and carrier mobility of two-dimensional materials, and limited applications, and achieves the improvement of photoelectric response performance. The effect of improving electrical and optoelectronic properties, photoresponse spectral width
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Embodiment 1
[0052] Embodiment 1 of the present invention provides a method for doping rare earth materials in the CVD growth of two-dimensional materials. The experiment of doped tungsten disulfide two-dimensional material is carried out in a dual-temperature zone vacuum tube furnace. The experimental device is as follows: figure 1 As shown, the grown erbium-doped tungsten disulfide WS 2 The schematic diagram of the temperature and airflow settings during the (Er) 2D material process is shown in Fig. figure 2 shown.
[0053] Specifically include the following steps:
[0054] (1) The substrate selected for the preparation of the sample is a single crystal silicon wafer with surface polishing or a single crystal silicon wafer with surface polishing and oxidation; before preparing the sample, the substrate needs to be cleaned to remove surface impurities; the substrate is immersed in acetone, alcohol, Ultrasonic cleaning was performed in deionized water for 10 min respectively; then the c...
Embodiment 2
[0064] The technical solution disclosed in Example 2 of the present invention is basically the same as that in Example 1, except that the sulfur powder is replaced with selenium powder, which is used to prepare tungsten selenide.
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