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Hydrogen sensor for leakage detection and preparation method of sensitive element of hydrogen sensor

A technology for leak detection and sensitive components, which is applied in the field of hydrogen sensors, can solve problems such as the inability to achieve sensitivity in hydrogen detection, the limited application of high-precision leak detection technology, and the impossibility of hydrogen leak detection methods, so as to improve the hydrogen sensitivity response performance and improve Hydrogen sensitive properties, the effect of reducing microstructure fracture of thin film

Pending Publication Date: 2021-10-01
杭州超钜科技有限公司
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  • Abstract
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  • Application Information

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Problems solved by technology

The tracer gas used in the tracer gas method includes radioactive gas, halogen gas, helium and hydrogen. Among them, the helium gas leak detection method is the most sensitive leak detection method, but the cost of helium gas leak detection is relatively high, and helium gas is rare in my country. Resources have been restricted by imports for a long time, and helium mass spectrometer leak detectors need to be implemented with a vacuum system, resulting in limited application of high-precision leak detection technology in industrial leak detection
[0004] Hydrogen leak detection method is an emerging gas leak detection technology, and its gas detection cost is more reasonable, but at present, hydrogen gas detection cannot achieve the same sensitivity as helium gas, which makes hydrogen gas leak detection method unable to be carried out in micro-leakage and precision device applications

Method used

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  • Hydrogen sensor for leakage detection and preparation method of sensitive element of hydrogen sensor
  • Hydrogen sensor for leakage detection and preparation method of sensitive element of hydrogen sensor
  • Hydrogen sensor for leakage detection and preparation method of sensitive element of hydrogen sensor

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Embodiment

[0029] Embodiment: a kind of hydrogen sensor for leakage detection of the present embodiment, such as figure 1As shown, it includes a cylindrical casing 1, which encloses an air chamber 2, the diameter of the air chamber is less than 20mm, and the height of the air chamber is less than 10mm. The shell is made of stainless steel, with low adsorption rate and high temperature resistance. An air inlet pipe 3 communicating with the air chamber is installed at the center of the housing top to form an air inlet 4, and two measuring probes 7 are also installed on the housing top, and the two measuring probes are located on both sides of the air inlet pipe. An air outlet pipe 5 communicating with the air chamber is installed at the center of the housing bottom to form an air outlet 6, and two heating probes 8 are installed at the bottom of the housing, and the two heating probes are located on both sides of the air outlet pipe. The measuring probe and the heating probe are respective...

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Abstract

The invention relates to a hydrogen sensor for leakage detection and a preparation method of a sensitive element of the hydrogen sensor. The hydrogen sensor comprises a gas chamber, one end of the gas chamber is provided with a gas inlet and a measuring probe, the other end of the gas chamber is provided with a gas outlet and a heating probe, a sensitive element is arranged in the gas chamber and comprises a substrate, a measuring electrode and a heating electrode, the measuring electrode is connected with the measuring probe, and the heating electrode is connected with the heating probe. The heating electrode is covered with a shielding layer, and the measuring probe and the heating probe are further electrically connected with a signal circuit located outside the gas chamber. The preparation method of the sensitive element comprises the following steps: plating multi-walled carbon nanotube loaded palladium-gold core-shell particle powder on the front surface of a substrate by adopting a vacuum coating method, and forming a measuring electrode after nano photoetching; sputtering platinum powder on the back face of the substrate in a vacuum mode, and forming a heating electrode after nanometer photoetching; and forming a silicon nitride film as the shielding layer by adopting a pulse laser deposition method to cover the heating electrode. The hydrogen measuring sensitivity is high and reaches ppb level.

Description

technical field [0001] The invention relates to a hydrogen sensor, in particular to a hydrogen sensor used for leak detection and a preparation method of a sensitive element thereof. Background technique [0002] In the process of automated production, industrial leak detection has become an indispensable practical technology to ensure the sealing of devices and systems, and can be widely used in aerospace, electronics industry, power industry refrigeration industry and other fields. [0003] Traditional industrial leak detection methods include differential pressure method, water detection method, ultrasonic method and tracer gas method. The detection rate of the pressure difference method is low, and it needs to be placed for a certain period of time, which is equivalent to the detection sensitivity of the water detection method, and only 10 -1 Pa·m 3 / s. Ultrasonic method can detect up to 10 -2 Pa·m 3 / s or so minimum leak rate. The tracer gas method is the most sen...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M3/20G01N27/12
CPCG01M3/20G01N27/127
Inventor 何镧刘佳琪王成宇黄雷
Owner 杭州超钜科技有限公司
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