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Spin wave field effect transistor based on carrier regulation and control and preparation method and application thereof

A field effect transistor and spin wave technology, applied in the field of quantum spin wave devices, can solve the problems of unknown cycle characteristics with electric field, very high requirements for preparation process, and difficulty in realizing electric field response, etc., to accelerate the commercialization process and thermal management. Low cost and the effect of reducing replacement cost

Active Publication Date: 2021-09-03
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the magnetic anisotropy field at the heterojunction interface has very high requirements on the preparation process, the field strength is relatively weak, and the cycle characteristics with the electric field are unknown. At present, it is difficult to achieve a large and stable response to the electric field.

Method used

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  • Spin wave field effect transistor based on carrier regulation and control and preparation method and application thereof
  • Spin wave field effect transistor based on carrier regulation and control and preparation method and application thereof
  • Spin wave field effect transistor based on carrier regulation and control and preparation method and application thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0038] Such as figure 2 Shown is a side view of the spin wave field effect transistor based on carrier regulation described in this embodiment.

[0039] A spin-wave field effect transistor based on carrier regulation, including a gadolinium gallium garnet (GGG) single crystal substrate, a bottom electrode layer of platinum (Pt), a P-type semiconductor thin film silicon (Si), and a magnetic thin film yttrium iron garnet Stone (YIG), microwave antenna chromium / gold (Cr / Au), and top electrode layer chromium / gold (Cr / Au).

[0040] Apply a positive bias on the top electrode layer to ensure that the electric field strength is greater than 0.02V / nm and less than 0.5V / nm at the same time, and an N-type inversion layer will appear on the upper surface of the P-type semiconductor film, adjusting the spin wave on the lower surface of the magnetic film propagating, the spin wave is regulated by the carrier electrons in the inversion layer.

[0041] The preparation process of the spin w...

Embodiment 2

[0049] Such as image 3 Shown is a side view of the spin wave field effect transistor based on carrier regulation described in this embodiment.

[0050] A spin-wave field effect transistor based on carrier regulation, including a gadolinium gallium garnet (GGG) single crystal substrate, a bottom electrode layer of platinum (Pt), a magnetic thin film of yttrium iron garnet (YIG), and a P-type semiconductor thin film Silicon (Si), Insulated Gate Silicon Dioxide (SiO 2 ), microwave antenna chromium / gold (Cr / Au), and top electrode layer chromium / gold (Cr / Au).

[0051] Apply a negative bias voltage on the top electrode layer to ensure that the electric field strength is greater than 0.02V / nm and less than 0.5V / nm at the same time, and an N-type inversion layer will appear on the lower surface of the P-type semiconductor film, adjusting the spin wave on the upper surface of the magnetic film propagating, the spin wave is regulated by the carrier electrons in the inversion layer. ...

Embodiment 3

[0061] A spin-wave field effect transistor based on carrier regulation, including a gadolinium gallium garnet (GGG) single crystal substrate, a bottom electrode layer of platinum (Pt), an N-type semiconductor film of indium tin oxide (ITO), and a magnetic film of yttrium Iron garnet (YIG), microwave antenna chromium / gold (Cr / Au), and top electrode layer chromium / gold (Cr / Au).

[0062] Apply a negative bias voltage on the top electrode layer to ensure that the electric field strength is greater than 0.02V / nm and less than 0.5V / nm at the same time, a P-type inversion layer will appear on the upper surface of the N-type semiconductor film, and the spin wave will be adjusted on the lower surface of the magnetic film. propagating, the spin wave is regulated by the carrier holes in the inversion layer.

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Abstract

The invention discloses a spin wave field effect transistor based on carrier regulation and control, and belongs to the field of quantum spin wave devices. The spin wave field effect transistor comprises a substrate, a bottom electrode layer and a spin wave field effect structure which are formed on the substrate, anda top electrode layer and a microwave antenna which are formed on the spin wave field effect structure. According to the device, voltage is applied in the vertical direction through an upper electrode and a lower electrode, so that an inversion layer appears on the surface of a semiconductor film, the inversion layer is in close contact with a spin wave propagation plane in a magnetic film, the carrier concentration in the inversion layer is adjusted through local voltage, spin waves are affected, and electric field regulation and control of spin wave transmission characteristics are achieved. The spin wave device is low in power consumption and simple in structure, compared with the prior art, the device has the advantage of stable and reliable response along with the electric field, a technology that the semiconductor film inversion layer thickness and carrier concentration response with the electric field is very mature, and mutual compatibility with the modern semiconductor technology is achieved.

Description

technical field [0001] The invention belongs to the technical field of quantum spin wave devices, and in particular relates to a spin wave field effect transistor based on carrier regulation and its preparation method and application. Background technique [0002] As the traditional semiconductor processing process is significantly slowed down by physical effects, spin wave devices use spin wave amplitude, phase and frequency as the carrier of information transmission and processing in the process of information transmission, and there is no transmission of physical particles in the process. Compared with traditional CMOS devices, it has extremely low power consumption, and is considered to be one of the important ways to realize the "post-Moore era". There are generally two implementation schemes for existing spin wave devices: one is to regulate the spin wave through a spatially distributed magnetic field, electric field or thermal field, and the other is local contact fie...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L29/66H01L29/78H01L21/336
CPCH01L29/66984H01L29/78H01L29/66477
Inventor 金立川徐嘉鹏宋祥林张怀武唐晓莉钟智勇
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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