Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Preparation method of porous ceramic plate and high-precision ceramic porous platform

A technology of porous ceramic plates and ceramics, applied in ceramic products, applications, household appliances, etc., can solve the problems of broken, material bending, large hole diameter, etc., and achieve the effect of preventing bending and breaking, and good electrical conductivity

Active Publication Date: 2021-06-29
中铭富驰(苏州)纳米高新材料有限公司
View PDF8 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

During wafer processing, such as cutting, photolithography, exposure, etc., the flatness is required to be controlled within 3 μm, while the traditional stage adopts the method of directly drilling holes on the aluminum alloy or marble platform, and then performing negative pressure adsorption , resulting in the aperture of the stage can only be controlled between 0.1mm-0.5mm, the aperture is large, and it is easy to cause the material to bend and break when absorbing thin film materials such as wafers or flexible screens

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Preparation method of porous ceramic plate and high-precision ceramic porous platform
  • Preparation method of porous ceramic plate and high-precision ceramic porous platform
  • Preparation method of porous ceramic plate and high-precision ceramic porous platform

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0036] S1, based on alumina, MAX phase ceramic Ti 3 AlC 2 Powder and Zr(P 1-x V x ) 2 o 7 The raw materials are mixed according to the molar ratio of 60:20:20 to obtain the mixed material, and the mixed material is sieved to control the particle size of the mixed material between 2 μm and 75 μm;

[0037] S2. Under stirring conditions, mix the mixed material with PVB (polyvinyl butyral) in a ratio of 60:40 and put them into a roller mill for grinding and mixing. The grinding and mixing time is 1 to 12 hours to obtain a mixed material

[0038] S3, put the mixture into a mold, the mold can be made of graphite material, its shape is square or round, the mold is placed in a one-way press for pre-compression, the pre-compression pressure is 50-100 Between MPa, hold the pressure for 1 to 5 minutes, press and form to obtain a green body;

[0039] S4, at a temperature of 300 o C, the holding time is 2 hours, and the heating rate is 1 o Under the condition of C / min, the green bo...

Embodiment 2

[0043] S1, based on silicon carbide, MAX phase ceramic Ti 3 AlC 2 Powder and (Zr, Hf)W 2 o 8 The raw materials are mixed according to the molar ratio of 80:10:10 to obtain the mixed material, and the mixed material is sieved to control the particle size of the mixed material between 2 μm and 75 μm;

[0044] S2, under stirring conditions, mix the mixed material with PMMA (methyl methacrylate) in a ratio of 50:50 and put them into a roller mill for grinding and mixing, and the grinding and mixing time is 1 to 12 hours to obtain the mixed material;

[0045] S3, put the mixture into a mold, the mold can be made of graphite material, its shape is square or round, the mold is placed in a one-way press for pre-compression, the pre-compression pressure is 50-100 Between MPa, hold the pressure for 1 to 5 minutes, press and form to obtain a green body;

[0046] S4, at a temperature of 500 o C, the holding time is 2 hours, and the heating rate is 1 o Under the condition of C / min, t...

Embodiment 3

[0050] Cordierite, MAX phase ceramic Ti 3 AlC 2 Powder and Zr(P 1-x V x ) 2 o 7 The raw materials are mixed according to the molar ratio of 40:35:25 to obtain the mixed material, and the mixed material is sieved to control the particle size of the mixed material between 2 μm and 75 μm;

[0051] S2, under stirring conditions, mix the mixed material with PVB (polyvinyl butyral) in a ratio of 70:30 and put them into a roller ball mill for grinding and mixing, and the grinding and mixing time is 1 to 12 hours to obtain the mixed material;

[0052] S3, put the mixture into a mold, the mold can be made of graphite material, its shape is square or round, the mold is placed in a one-way press for pre-compression, the pre-compression pressure is 50-100 Between MPa, hold the pressure for 1 to 5 minutes, press and form to obtain a green body;

[0053] S4, at a temperature of 300 o C, the holding time is 2 hours, and the heating rate is 1 o Under the condition of C / min, the green ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
sizeaaaaaaaaaa
pore sizeaaaaaaaaaa
electrical resistanceaaaaaaaaaa
Login to View More

Abstract

The invention discloses a preparation method of a porous ceramic plate and a high-precision ceramic porous platform, wherein the preparation of the porous ceramic plate comprises the following steps: taking a ceramic material, a resistance regulation factor material and a thermal expansion coefficient adjusting material as raw materials, mixing the materials, adding a pore-forming agent, stirring and grinding, carrying out pre-pressing molding, carrying out heating pyrolysis, carrying out pressureless sintering, and carrying out heat preservation and pressure maintenance, so as to obtain the porous ceramic plate. In the method, the electrical conductivity and thermal conductivity of the porous ceramic plate are reduced by adding the resistance regulating factor material and the thermal expansion coefficient adjustment material, and the pore-forming agent is added at the same time; and holes are formed in a pyrolysis mode, so that the hole diameter of manufactured high-precision ceramic porous platform communicating holes is controlled to be 1-100 microns, the hole content is controlled to be 10-60%, the precision during processing operation is ensured, and product abrasion is prevented.

Description

technical field [0001] The invention relates to the technical field of ceramic materials and technology thereof, in particular to a preparation method of a porous ceramic plate and a high-precision ceramic porous platform. Background technique [0002] In the display panel manufacturing process, a carrier is usually used to carry and fix the liquid crystal display panel to facilitate the manufacturing process. The traditional stage structure is made of metal, and the top surface has a plurality of negative pressure pores, and one side has an air port connected to the plurality of negative pressure pores for connection with a negative pressure device, and then the negative pressure device can be used to make the negative pressure The air pressure holes generate suction force for absorbing and fixing the liquid crystal display panel on the platform so as to facilitate the operation of each process of the liquid crystal display panel. However, due to the thermal conductivity a...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): C04B38/06C04B35/10C04B35/195C04B35/565C04B35/622
CPCC04B38/067C04B35/10C04B35/565C04B35/195C04B35/622C04B2235/3817C04B2235/3244C04B2235/3239C04B2235/447C04B2235/6562C04B2235/6567C04B2235/9607C04B38/0074C04B38/0054
Inventor 贝国平李华陈晓东
Owner 中铭富驰(苏州)纳米高新材料有限公司
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com