Tail gas treatment device for phosphorane preparation

Abstract

The invention provides a tail gas treatment device for phosphorane preparation, belonging to the field of phosphorane tail gas treatment. The tail gas treatment device for phosphorane preparation comprises an absorption tower, wherein an L-shaped pipe is arranged on one side of the bottom wall of the absorption tower, a gas inlet pipe is fixedly connected to one end of the U-shaped pipe, a neutralizing solution is arranged in the absorption tower, a liquid discharging pipe and a spraying pipe are fixedly connected to one end of a connecting pipe, a first electromagnetic valve is arranged in the middle portion of the liquid discharging pipe, and one end of the spraying pipe penetrates through a spraying chamber and is fixedly connected with a spraying disc. According to the invention, a neutralization solution is stirred through fan blades and can be continuously sprayed from the inner upper part of the spraying chamber through a water pump, the spraying pipe, a spraying disc and a spraying head, so tail gas containing phosphorane is subjected to absorption treatment again, the phosphorane in the tail gas can be fully absorbed, and the tail gas treatment effect is improved; and by closing a second electromagnetic valve and opening the first electromagnetic valve, neutralization solution is convenient to replace continuously, and therefore, the device is worthy of vigorous popularization.

Description

technical field [0001] The invention relates to the technical field of phosphine tail gas treatment, in particular to a tail gas treatment device for phosphine preparation. Background technique [0002] Phosphine generally refers to phosphine. Phosphine is a colorless, highly toxic and flammable liquefied compressed gas stored in steel cylinders. The chemical formula is PH3. Pure phosphine gas is colorless and odorless. Inhalation of phosphorus Hydrogen will affect the heart, respiratory system, kidney, stomach, nervous system and liver. Phosphine-containing gas is often used as doping gas in the electronics industry. Since phosphine gas is a highly toxic substance, it is necessary to treat the phosphine tail gas , There are many domestic PH3 purification technology methods, which can be divided into wet method and dry method. Among them, the wet method mainly uses the reducibility of PH3 to treat PH3 with an oxidant in the absorption tower. It mainly includes the concentrat...

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Problems solved by technology

[0005] In view of the deficiencies in the prior art, the present invention provides a tail gas treatment device for phosphine preparation, which solves the problem that the actual absorption effect of the phosphine tail gas is not ideal, and some phosphine gas still enters the air, and the reaction cannot be recovered in time. The problem of residual liquid after

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