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Component gradient magnetic metal-magnetic oxide particle film and preparation method thereof

A magnetic oxide, magnetic metal technology, applied in the application of magnetic objects, magnetic films to substrates, magnetic materials, etc., can solve the problems of complex production process, reduce complex magnetic permeability, etc., to enhance the exchange coupling effect, improve Effect of saturation magnetization, high complex permeability

Active Publication Date: 2021-06-08
SHANDONG NON METALLIC MATERIAL RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But SiO 2 As a non-magnetic medium material, the complex permeability is reduced to a certain extent
[0007] CN 108000973B introduces a gradient magnetic multilayer electromagnetic wave absorption film and its preparation method. The film adopts co-sputtering and alternate sputtering methods to prepare a gradient multilayer film composed of magnetic particle film layer and isolation layer, which meets the requirements of electromagnetic wave absorption film Impedance matching requirements, but the multilayer film is not a continuous film, the volume content of the composition changes in a stepwise gradient, and the manufacturing process is relatively complicated

Method used

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  • Component gradient magnetic metal-magnetic oxide particle film and preparation method thereof
  • Component gradient magnetic metal-magnetic oxide particle film and preparation method thereof
  • Component gradient magnetic metal-magnetic oxide particle film and preparation method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0039] A method for preparing a composition gradient magnetic metal-magnetic oxide particle film:

[0040] Use quartz glass as the substrate, use acetone, absolute ethanol, and deionized water to ultrasonically clean it for 15 minutes, and dry it in a vacuum oven. Observe under a microscope that there are no dust and other pollutants, and fix it on a sample holder with an induced magnetic field strength of 1000Oe. On; Fe with a purity of 99.98% 65 co 35 (The subscript on the right is the volume content ratio, and the following examples are expressed in the same way) The target material is installed on the DC magnetron target gun (A target), and the CoFe with a purity of 99.9% 2 o 4 The target is installed on the RF magnetron target gun (B target);

[0041] Two-stage vacuuming with mechanical pump and molecular pump to 5×10 -5 Pa, the sample carrier is sent into the sputtering chamber, the base distance of A target is 7cm, the base distance of B target is 13cm, the substrat...

Embodiment 2

[0048] A method for preparing a composition gradient magnetic metal-magnetic oxide particle film:

[0049] Using polyester as the substrate, the cleaning process is the same as in Example 1, and it is fixed on a sample holder with an induced magnetic field strength of 100 Oe. Fe with a purity of 99.96% 70 Si 15 B 15 The target is installed to the DC magnetron target gun (A target), and the MnFe with a purity of 99.7% 2 o 4 The target is installed on the RF magnetron target gun (B target);

[0050] Use mechanical pump and molecular pump to evacuate to 1×10 -5 Pa, the sample carrier is sent into the sputtering chamber, the target base distance is 22cm, the substrate temperature is room temperature, and the rotation rate of the sample stage is 10r / min;

[0051] Fill the sputtering chamber with argon gas with a purity of 99.999%, the flow rate is 10 sccm, and the total pressure is kept at 5 Pa;

[0052] Set the sputtering power of targets A and B to 320W and 10W respectivel...

Embodiment 3

[0056] A method for preparing a composition gradient magnetic metal-magnetic oxide particle film:

[0057] Using polyimide as the substrate, the cleaning process is the same as in Example 1, and it is fixed on a sample holder with an induced magnetic field strength of 500 Oe. A Co target with a purity of 99.99% is installed on the DC magnetron target gun (A target), and a ZnFe target with a purity of 99.7% 2 o 4 The target is installed on the RF magnetron target gun (B target);

[0058] Two-stage vacuuming with mechanical pump and ion pump to 3×10 -5 Pa, the sample carrier is sent into the sputtering chamber, the target base distance is 15cm, the substrate temperature is room temperature, and the sample stage rotation rate is 5r / min;

[0059] Fill the sputtering chamber with argon gas with a purity of 99.999%, the flow rate is 15 sccm, and the total pressure is kept at 0.2 Pa;

[0060] Set the sputtering power of targets A and B to 10W and 10W respectively, and pre-sputter...

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Abstract

The invention belongs to the technical field of electromagnetic wave protection materials, and particularly relates to a component gradient magnetic metal-magnetic oxide particle film and a preparation method thereof. The particle film is composed of a particle film with the magnetic metal component volume content gradient continuously decreasing from a base layer to a surface layer in the direction perpendicular to a substrate. The gradient change range of the magnetic metal components is 20-99%; the magnetic metal is one or an alloy of Fe, Co and Ni, and can be doped with one or a mixture of two of Si and B; and the magnetic oxide is one of CoFe2O4, ZnFe2O4, NiFe2O4, MnFe2O4, NiCo2O4, Co2O3 and Fe3O4. The preparation method adopts a magnetron co-sputtering process. The composition gradient continuously changes, the manufacturing process is simple, and the prepared particle film meets the requirements of impedance matching characteristics and electromagnetic wave attenuation characteristics.

Description

technical field [0001] The invention belongs to the technical field of electromagnetic wave protection materials, and in particular relates to a magnetic metal-magnetic oxide particle film with continuously changing composition gradient and a preparation method thereof. Background technique [0002] Electromagnetic wave absorbing materials are an important class of materials in the technical field of electromagnetic wave protection materials. Traditional electromagnetic wave absorbing materials such as carbonyl iron powder, ferrite and other powders are subject to the Snoek limit, and the magnetic permeability is difficult to further improve, especially in the low frequency band of radar ( 0.5GHz~4GHz) the absorption effect is generally poor. [0003] The absorbing material must have two basic conditions for absorbing electromagnetic waves: 1) Impedance matching characteristics, that is, the incident wave enters the interior of the material to the maximum extent without refl...

Claims

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Application Information

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IPC IPC(8): H01F1/16H01F1/34H01F41/14H05K9/00
CPCH01F1/342H01F1/344H01F1/16H05K9/0081H01F41/14
Inventor 杨丰帆于名讯胡国祥潘士兵孙向民孙建生徐勤涛连军涛刘景桑晓明
Owner SHANDONG NON METALLIC MATERIAL RES INST
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