Sensor for detecting hydrogen sulfide gas at room temperature
A gas detection and sensor technology, which is applied in the field of construction engineering, can solve the problems of high power consumption and low sensor sensitivity, and achieve the effects of low power consumption, high selectivity and short response time
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[0028]Next, the technical solutions in the embodiments of the present invention will be apparent from the embodiment of the present invention, and it is clearly described, and it is understood that the described embodiments are merely embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, there are all other embodiments obtained without making creative labor without making creative labor premises.
[0029]In order to prepare a gas-sensitive element, a Ti (5 nm) / au (50 nm) film is deposited on the surface of the glass substrate using a radio frequency magnetron sputtering method. Then, the metal film is patterned to form a fork finger electrode (Ide) having 22 fingers and 100 mm gaps.figure 2 A schematic diagram of the manufacturing process step of forming a fork finger is given. Then, the undoped ZnO film is grown through the surface of the entire surface as a seed layer by hydrothermal synthesis. The hydrothermal reaction...
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