A kind of ethyl acetate gas sensor and preparation method thereof

A gas sensor, ethyl acetate technology, applied in instruments, scientific instruments, measuring devices, etc., can solve problems such as threatening life and property safety, easy to explode, etc., and achieve the effects of small size, low cost, and simple preparation method

Active Publication Date: 2018-12-21
重庆渝微电子技术研究院有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

When the leaked ethyl acetate reaches a certain concentration, it is very easy to explode when exposed to an open flame, threatening the safety of people's lives and property

Method used

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  • A kind of ethyl acetate gas sensor and preparation method thereof
  • A kind of ethyl acetate gas sensor and preparation method thereof
  • A kind of ethyl acetate gas sensor and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0045] First, use acetone and ethanol cotton balls to wipe the Al with Pd metal interdigitated electrodes with a width of 3mm and a length of 4mm prepared by screen printing technology. 2 o 3 The substrate is clean, and then the Al with Pd metal interdigitated electrodes 2 o 3 The substrate was placed in acetone, ethanol and deionized water in turn, ultrasonically cleaned for 5 minutes respectively, and finally dried at 100°C for later use.

[0046] Among them, the use of screen printing technology in Al 2 o 3 Prepare Pd metal finger electrodes on the substrate, according to the mass ratio of ink [Jiahua JX07500487]:Pd powder:diluent is 1:1:2, stir to make a paste; then inject the paste into the On the screen plate of the finger electrode pattern, scrape the paste under the conditions of an inclination angle of 30° and a pressure of 5 Newtons, print the electrode and dry it, and complete the preparation of the Pd metal finger electrode after UV curing. The width and elect...

Embodiment 2

[0053] First, use acetone and ethanol cotton balls to wipe the Al with a width of 3 mm and a length of 4 mm with Pd metal interdigitated electrodes prepared by screen printing technology. 2 o 3 The substrate is clean, and then the Al with Pd metal interdigitated electrodes 2 o 3 The substrate was placed in acetone, ethanol and deionized water in turn, ultrasonically cleaned for 5 minutes respectively, and finally dried at 100°C for later use.

[0054] Among them, screen printing technology is used to prepare pd metal interdigitated electrodes, according to the mass ratio of ink [Jiahua JX07500487]: pd powder: diluent is 1:1:2, stir and prepare a paste; then inject the paste On the screen plate with the interdigitated electrode pattern, scrape the paste at an inclination angle of 45° and a pressure of 10 N, print the electrode and dry it, and complete the preparation of the metal interdigitated electrode after UV curing. The width and electrode spacing of the interdigitated ...

Embodiment 3

[0061] First, use acetone and ethanol cotton balls to wipe the Al with a width of 3 mm and a length of 4 mm with Pd metal interdigitated electrodes prepared by screen printing technology. 2 o 3 The substrate is clean, and then the Al with Pd metal interdigitated electrodes 2 o 3 The substrate was placed in acetone, ethanol and deionized water in turn, ultrasonically cleaned for 5 minutes respectively, and finally dried at 100°C for later use.

[0062]Among them, screen printing technology is used to prepare pd metal interdigitated electrodes, according to the mass ratio of ink [Jiahua JX07500487]: pd powder: diluent is 1:1:2, stir and prepare a paste; then inject the paste On the screen plate with the interdigitated electrode pattern, scrape the paste at an inclination angle of 45° and a pressure of 10 N, print the electrode and dry it, and complete the preparation of the metal interdigitated electrode after UV curing. The width and electrode spacing of the interdigitated e...

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Abstract

The invention relates to an ethyl acetate gas sensor using Al-doped cubic-structure In2O3 microparticles as a sensitive layer and a preparation method thereof, belonging to the technical field of gas sensors. The sensor is sequentially composed of an Al2O3 substrate, a Pd metal interdigital electrode and an Al-doped cubic-structure In2O3 microparticle sensitive layer from bottom to top, wherein the sensitive layer is prepared on the Pd-metal-interdigital-electrode-bearing Al2O3 substrate by an application technique; and the particle size of the Al-doped cubic-structure In2O3 microparticles is 1-1.2 mu m. The Al doped into the cubic-structure In2O3 microparticles causes lattice defects, and the lattice defects are beneficial to enhancing the gas-sensitive response of the gas-sensitive material. The technique is simple; and the prepared ethyl acetate gas sensor is small in size and suitable for mass production, and thus, has important application value. The preparation method is simple, has the characteristics of low cost and high response restoration speed, is hopeful to implement large-scale production, and has favorable detection performance for ethyl acetate gas.

Description

technical field [0001] The invention belongs to the technical field of gas sensors, in particular to an Al-doped cubic structure In 2 o 3 An ethyl acetate gas sensor with micron particles as a sensitive layer and a preparation method thereof. Background technique [0002] With the rapid development of industry and technology, while the material wealth is extremely rich, the problems of production safety and environment are becoming increasingly prominent. People have more and more opportunities to be exposed to dangerous gases, such as natural gas with methane and carbon monoxide as the main components, organic volatile toxic gases formaldehyde, benzene, xylene released from decoration materials, sulfur dioxide and sulfur dioxide in coal combustion and automobile exhaust. nitrogen oxides, etc. Once these flammable, explosive, toxic and harmful gases are produced or leaked, they will pose a threat to people's health and lives. Therefore, it is very necessary to develop ga...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/12
CPCG01N27/125
Inventor 阮圣平申婧丽周敬然温善鹏郭文滨沈亮董玮张歆东陈川孙亮
Owner 重庆渝微电子技术研究院有限公司
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